Monolithic Vacuum Manometer Using Parasitic Capacitive Coupling
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Solution Overview
Problem
Conventional diaphragm-based manometers are labor-intensive and costly to produce due to precise components and thermal effects, which affect repeatability and sensitivity to pressure changes.
Innovation Solution
A monolithic design with a glass-coated base and conductive elements, using parasitic capacitive coupling to interfere with electrostatic fields, and grounding the sensor circuit to reduce stray capacitance, simplifying the manometer's structure and manufacturing process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional diaphragm-based manometers use precise components and multiple electrodes to improve measurement precision and reduce temperature variation effects, then measurement precision is improved, but device complexity and manufacturing cost increase
Solution Approach 1:
The patent merges the base structure and electrode support into a single monolithic glass-coated base, eliminating the need for separate ceramic bases and multiple discrete components. This consolidation maintains measurement precision while reducing device complexity and manufacturing steps.
Solution Approach 2:
The glass-coated base serves multiple functions: it provides structural support, acts as a thermal expansion compensation mechanism, supports the conductive electrodes, and provides a stable mounting surface. This multi-functionality reduces the number of separate components needed while maintaining measurement precision.
2Measurement precision
If conventional diaphragm-based manometers use multiple components and precise tolerances to improve sensitivity to pressure changes, then sensitivity is improved, but manufacturing cost and labor intensity increase
Solution Approach 1:
The patent replaces complex mechanical assembly with a monolithic glass-coated base structure where electrodes are directly supported on the glass surface. This substitution maintains sensitivity to pressure changes while dramatically simplifying manufacturing and reducing labor intensity.
Solution Approach 2:
The patent changes the physical state and properties of the base material by using a glass coating that can be applied in a molten state and then cooled. This parameter change allows for a smooth, stable surface that maintains electrode positioning and sensitivity while enabling simpler manufacturing processes.
3Reliability
If conventional diaphragm-based manometers use thermal expansion compensation components to reduce temperature variation effects, then reliability is improved, but device complexity increases
Solution Approach 1:
The patent utilizes the thermal expansion properties of the glass-coated base itself to compensate for temperature variations. The glass material's controlled thermal expansion characteristics provide automatic compensation, eliminating the need for separate compensation components while maintaining repeatability.
Solution Approach 2:
The patent creates a homogeneous structure where the glass coating integrates the base and electrode support functions. This homogeneity ensures uniform thermal response across the entire structure, providing reliable temperature compensation without additional components.
4Measurement precision
If conventional diaphragm-based manometers use multiple discrete components to reduce stray capacitance effects, then measurement precision is improved, but productivity decreases
Solution Approach 1:
The patent merges the base structure and electrode support into a single monolithic glass-coated base, reducing the number of discrete components. This merging maintains measurement precision by providing stable electrode positioning while significantly improving productivity through simplified manufacturing.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution results in a more cost-effective, repeatable, and less sensitive manometer capable of large-scale production with improved sensitivity to pressure changes, reducing environmental and thermal effects.
Implementation Method 1
sensing a change in parasitic capacitive coupling between multiple parasitic capacitively coupled conductive elements in response to a diaphragm disturbing an electrostatic field between the parasitic capacitance coupled conductive elements
Implementation Method 2
a diaphragm disturbing an electrostatic field between the parasitic capacitance coupled conductive elements
Data Source
AI summary
A monolithic manometer and method of sensing pressure changes may include sensing a change in parasitic capacitive coupling between multiple parasitic capacitive coupled conductive elements in response to a diaphragm disturbing the parasitic capacitive coupling between the conductive elements. A signal representative of the sensed change in parasitic capacitive coupling may be output.