Monolithic Base Mass Flow Controller for Semiconductor Gas Delivery
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Solution Overview
Problem
The semiconductor industry requires mass flow controllers with diverse operating characteristics, which often necessitates custom component configurations and mounting bases, leading to increased costs and complexity due to the need for varied operating characteristics and space constraints.
Innovation Solution
A modular approach using a common monolithic base with multiple flow component mounting regions, allowing different sets of flow components to be coupled to achieve various operating characteristics, thereby reducing production time and costs while accommodating a range of mass flow rates and configurations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If custom component configurations and mounting bases are used for each mass flow controller model, then diverse operating characteristics are achieved, but system costs and device complexity increase
Solution Approach 1:
The patent implements a universal monolithic mounting base design that can accommodate multiple types of flow components (laminar flow elements, control valves, pressure transducers, temperature sensors, on/off valves) through standardized mounting regions. This single base design replaces the need for multiple custom mounting bases, achieving diverse operating characteristics while reducing device complexity and cost.
Solution Approach 2:
The mounting base is divided into multiple flow component mounting regions, each capable of accepting different flow components. This segmentation allows flexible configuration of different component types in different regions to achieve various operating characteristics, while the overall base structure remains standardized and reusable across different mass flow controller models.
2Adaptability or versatility
If custom component configurations are used for each mass flow controller model, then diverse operating characteristics are achieved, but production time increases
Solution Approach 1:
The monolithic mounting base is pre-designed with multiple standardized flow component mounting regions before production begins. This preliminary preparation of the base structure with integrated mounting locations for various flow components eliminates the need for custom base fabrication for each model, significantly reducing production time while maintaining the ability to achieve diverse operating characteristics through component selection.
3Adaptability or versatility
If custom mounting bases are used for each mass flow controller model, then diverse operating characteristics are achieved, but space constraints are worsened
Solution Approach 1:
The patent merges multiple previously separate mounting base designs into a single integrated monolithic base structure. By combining the mounting regions for laminar flow elements, control valves, pressure transducers, temperature sensors, and on/off valves into one unified base, the design achieves diverse operating characteristics while optimizing space utilization and reducing the total area required compared to having separate custom bases for each component type.
Data Source
AI summary
A mass flow control apparatus having a monolithic base. The monolithic base has a gas inlet, a gas outlet, a first flow component mounting region, a second flow component mounting region, and a third flow component mounting region. The first flow component mounting region has a first inlet port and a first outlet port, the first inlet port being fluidly coupled to the gas inlet of the monolithic base. The second flow component mounting region has a second inlet port, a second outlet port, and a first auxiliary port.