Monolithic MEMS Spectroscopic Instrument Miniaturization
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Solution Overview
Problem
Conventional spectroscopic instruments face limitations in miniaturization and cost-effectiveness, particularly in addressing wide spectral ranges due to the size and complexity of components like DLPs and silicon detectors, which restrict their use in portable devices like mobile phones.
Innovation Solution
A spectroscopic instrument with a movable MEMS mirror monolithically configured with aperture limiting devices and a dispersive element, allowing for reduced deflection range and simplified adjustment, enabling miniaturization and cost-effective manufacturing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If conventional spectroscopic instruments use separate components for mirrors, aperture limiting devices, and dispersive elements, then spectral analysis capability is maintained, but device size and complexity increase
Solution Approach 1:
The patent combines the MEMS mirror, aperture limiting devices, and dispersive element into a single monolithic component structure. The MEMS mirror is integrated with the aperture limiting devices such that they share a common substrate and mounting structure, eliminating the need for separate adjustment mechanisms and reducing overall device volume while maintaining spectral analysis functionality.
2Adaptability or versatility
If the MEMS mirror has a large deflection range to cover wide spectral ranges, then spectral coverage is improved, but the complexity of control and alignment increases
Solution Approach 1:
The patent utilizes the lateral offset arrangement of aperture limiting devices from the rotational axis of the MEMS mirror to create an additional degree of freedom in spectral tuning. By combining the angular deflection of the MEMS mirror with the spatial offset of the aperture devices, the system achieves wide spectral coverage through a combination of rotational and positional parameters, reducing the required deflection range while maintaining versatility.
3Measurement precision
If conventional instruments require precise adjustment of multiple separate components, then spectral analysis precision is maintained, but manufacturing and alignment cost increase
Solution Approach 1:
The monolithic integration of the MEMS mirror with the aperture limiting devices eliminates the need for separate adjustment mechanisms. All components are fabricated together on a single substrate using standard MEMS manufacturing processes, ensuring precise relative positioning without requiring post-fabrication alignment procedures, thereby reducing manufacturing complexity and cost while maintaining spectral analysis precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution achieves significant miniaturization and cost reduction by halving the deflection range of the MEMS mirror, allowing for more precise component alignment and integration into compact devices while maintaining spectral analysis capabilities.
Implementation Method 1
a dispersive element spatially separate from the MEMS mirror... the dispersive element being configured to spectrally split up the influenced radiation
Implementation Method 2
the movable MEMS mirror being movable in relation to the dispersive element... configured to reflect the influenced radiation to the dispersive element
Data Source
AI summary
A spectroscopic instrument includes a first aperture limiting device, a second aperture limiting device, a first mirror, a movable MEMS mirror, and a dispersive element spatially separate from the MEMS mirror, the movable MEMS mirror being movable in relation to the dispersive element, the movable MEMS mirror being monolithically configured as a common component with at least one of the first aperture limiting device, the second aperture limiting device, and the dispersive element, and the first and second aperture limiting devices being arranged to be spatially separate from the movable MEMS mirror and having a lateral offset from a rotational axis of the movable MEMS mirror.