Monolithic Metal-Insulator Transition Structure for Low On-Resistance

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Solution Overview

Problem

Existing power semiconductor devices face challenges in achieving high breakdown voltage and low on-resistance while minimizing heating when switched on, and they require complex manufacturing processes.

Innovation Solution

A monolithic metal-insulator transition device is developed with a switching region and a driving region on a single silicon substrate, utilizing negative differential resistance (NDR) properties, where the driving region supplies critical current for metal-insulator transition switching, and includes specific doping and wiring configurations to enhance electrical properties.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If conventional power semiconductor devices are used, then breakdown voltage can be achieved, but on-resistance is high and heating occurs when switched on

Engineering Contradiction:
Improvebreakdown voltageVSAvoidon-resistance and heating
Core Design Contradiction:
StrengthVSReliability

Solution Approach 1:

The patent utilizes the metal-insulator transition phenomenon by changing the physical state of the resistive switching layer material. When voltage is applied, the material transitions from an insulating state (high resistance) to a metallic state (low resistance), thereby reducing on-resistance and minimizing heating while maintaining high breakdown voltage capability.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The device employs a composite structure consisting of multiple layers including a resistive switching layer, electrode layers, and insulating layers. This composite material architecture enables simultaneous achievement of high breakdown voltage and low on-resistance by combining materials with complementary properties.

Inventive Principle:
Principle #40Composite materials

2Reliability

If complex manufacturing processes are used to achieve high performance, then electrical properties improve, but manufacturing complexity increases

Engineering Contradiction:
Improveelectrical propertiesVSAvoidmanufacturing process complexity
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The patent integrates the driving region and switching region into a single monolithic device structure on one substrate. This merging of functions into a unified device reduces manufacturing steps compared to assembling separate components, while maintaining excellent electrical properties through the integrated design.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The device is divided into distinct functional regions (driving region with first source/drain regions and gate electrode, and switching region with second source/drain regions and resistive switching layer) that can be manufactured using standard semiconductor fabrication processes, enabling modular and scalable production.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The device achieves reduced on-resistance and improved breakdown voltage, with enhanced electrical reliability and simplified manufacturing, effectively addressing the limitations of existing power semiconductor devices.

Implementation Method 1

A metal-insulator transition device is a switching device using state transition of a material

Methodology Applied
Scientific EffectMetal-insulator transition:

Implementation Method 2

The on-resistance of the monolithic metal-insulator transition device may be reduced by using negative differential resistance (NDR) properties

Methodology Applied
Scientific EffectNegative differential resistance (NDR):

Implementation Method 3

an inlet well region formed adjacent to an upper surface of the substrate in the switching region and doped with an impurity of a first conductivity type, a control well region having a second conductivity type different from the first conductivity type

Methodology Applied
Scientific EffectElectrical conduction: Conduction (electrical)

Data Source

PatentUS11908931B2Monolithic metal-insulator transition device and method for manufacturing the same
Publication Date: 2024.02.20 ELECTRONICS & TELECOMM RES INST
  • US11908931B2 patent drawing
  • US11908931B2 patent drawing
  • US11908931B2 patent drawing

AI summary

Provided is a monolithic metal-insulator transition device. The monolithic metal-insulator transition device includes a substrate including a driving region and a switching region, first and second source/drain regions on the driving region, a gate electrode between the first and second source/drain regions, an inlet well region formed adjacent to an upper surface of the substrate on the switching region, a control well region having a different conductivity type from the inlet well region between the inlet well region and a lower surface of the substrate, a first wiring electrically connecting the first source/drain region and the control well region, and a second wiring electrically connecting the second source/drain region and the inlet well region.