Monolithic Power MOSFET Gate Driver Integration for Lower Connection Loss

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Solution Overview

Problem

Existing power transistor devices for power electronic applications, such as Si CoolMOS®, Si Power MOSFETs, and Si Insulated Gate Bipolar Transistors (IGBTs), are large in size and have significant electrical connections that lead to losses and reduced efficiency.

Innovation Solution

A semiconductor device is developed with a vertical power FET and two lateral FETs monolithically integrated into a semiconductor substrate, where the lateral FETs form an output stage of the gate driver circuit, reducing physical size and electrical connections, and incorporating a charge compensation structure to enhance efficiency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Loss of energy

If separate packaged components are used for power MOSFETs and gate driver, then device functionality is achieved, but circuit size is large and efficiency is reduced due to significant electrical connections

Engineering Contradiction:
Improveelectrical connection lossesVSAvoidcircuit integration level
Core Design Contradiction:
Loss of energyVSDevice complexity

Solution Approach 1:

The patent merges the power MOSFET and gate driver components into a single monolithic semiconductor device. The gate driver circuitry is integrated directly onto the same semiconductor substrate as the power MOSFET, eliminating the need for separate packaged components and reducing electrical connection losses between components.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent transitions from a three-dimensional assembly of separate packaged components to a two-dimensional planar integration on a single semiconductor substrate. This dimensional change enables direct integration of the gate driver circuitry with the power MOSFET, reducing connection path lengths and energy losses.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Area of stationary object

If separate packaged components are mounted within a module, then device functionality is achieved, but physical size of the circuit is reduced only partially

Engineering Contradiction:
Improvecircuit footprintVSAvoidelectrical connection losses
Core Design Contradiction:
Area of stationary objectVSLoss of energy

Solution Approach 1:

The patent combines multiple functional components (power MOSFET, gate driver, and associated circuitry) into a single monolithic device structure. This merging eliminates the need for mounting separate components within a module, thereby minimizing both the physical footprint and electrical connection path lengths.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent segments the semiconductor substrate into distinct functional regions: a first region for the power MOSFET and a second region for the gate driver circuitry. This segmentation allows for optimized layout and minimization of electrical connections while maintaining functional separation.

Inventive Principle:
Principle #1Segmentation

3Productivity

If vertical power FET with lateral FETs are monolithically integrated, then efficiency is improved and circuit size is reduced, but manufacturing complexity increases

Engineering Contradiction:
Improvedevice integration densityVSAvoidfabrication process complexity
Core Design Contradiction:
ProductivityVSEase of manufacture

Solution Approach 1:

The patent divides the semiconductor substrate into distinct functional regions: a first region for the vertical power MOSFET and a second region for the lateral FETs forming the gate driver output stage. This segmentation simplifies the fabrication process by allowing standardized manufacturing techniques to be applied to each region while achieving high integration density.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent uses a common semiconductor substrate for both the power MOSFET and gate driver circuitry, making the substrate serve multiple functions. This universal approach reduces manufacturing steps compared to processing separate substrates and then assembling them, thereby improving ease of manufacture despite the integrated design.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Data Source

PatentUS12575176B2Semiconductor device and method of fabricating a semiconductor device
Publication Date: 2026.03.10 INFINEON TECH AUSTRIA AG
  • US12575176B2 patent drawing
  • US12575176B2 patent drawing
  • US12575176B2 patent drawing

AI summary

In an embodiment, a semiconductor device includes a vertical power FET for switching a load current, the power FET including a channel region of a first conductivity type and a first lateral FET and a second lateral FET providing an output stage of gate driver circuitry for driving the power FET. The first lateral FET includes a channel region of the first conductivity type and the second lateral FET includes a channel region of a second conductivity type opposing the first conductivity type. The power FET and the first and second lateral FETs are monolithically integrated into a semiconductor substrate of the first conductivity type and that has a first surface. A drain of the first lateral FET and a source of the second lateral FET are electrically coupled to a gate of the power FET.