Monolithic Optical Element for Broadband Radiation

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Solution Overview

Problem

Optical fibers used for broadening the frequency range of pump radiation are fragile and prone to stress-induced issues due to their relative fragility and susceptibility to stress buildup at fixation points, which affects their performance in lithographic apparatuses.

Innovation Solution

A monolithic optical element with a hollow core region surrounded by a cladding region and a supporting region, where the supporting region is designed to be substantially rigid, providing a larger diameter and increased strength compared to traditional optical fibers, thereby reducing fragility and stress-induced behavior.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If optical fibers are used for broadening the frequency range of pump radiation, then the frequency range can be broadened, but the optical fibers are fragile and prone to stress-induced issues

Engineering Contradiction:

Improvefrequency range broadening capabilityVSAvoidfragility and stress susceptibility

Core Design Contradiction:

Adaptability or versatilityVSReliability

Solution Approach 1:

The optical element is segmented into distinct functional regions: a hollow core region for radiation propagation, a cladding region with micro-structures for non-linear optical behavior, and a supporting region for mechanical strength. This segmentation allows each region to be optimized for its specific function while working together as an integrated whole, resolving the contradiction between achieving frequency broadening and maintaining reliability

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The optical element employs a composite structure combining different material properties in distinct regions: the hollow core region provides low-loss radiation guidance, the cladding region with micro-structures provides non-linear optical properties for frequency broadening, and the supporting region provides mechanical strength and rigidity. This composite approach enables simultaneous achievement of optical performance and mechanical reliability

Inventive Principle:

Principle #40Composite materials

2Strength

If the supporting region is made substantially rigid with large transversal dimension, then strength and reduced stress susceptibility are achieved, but device complexity increases

Engineering Contradiction:

Improvemechanical strength and rigidityVSAvoidstructural complexity

Core Design Contradiction:

StrengthVSDevice complexity

Solution Approach 1:

The patent merges multiple functions into a single monolithic optical element: radiation guidance, non-linear optical interaction for frequency broadening, and mechanical support. By combining these functions into one integrated structure rather than separate components, the design achieves high strength and rigidity without proportionally increasing overall device complexity

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The optical element applies local quality by providing different structural characteristics in different regions: the hollow core region is optimized for radiation propagation with minimal material, the cladding region has micro-structures for non-linear optical effects, and the supporting region has sufficient material thickness for mechanical strength. This localized optimization allows each region to perform its function efficiently without unnecessary complexity elsewhere

Inventive Principle:

Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The monolithic optical element effectively generates broadband radiation with improved strength and reduced susceptibility to stress, enhancing its performance and reliability in applications such as lithographic apparatuses by providing a more robust and stable platform for wavelength spectrum broadening.

Implementation Method 1

a cladding region surrounding the hollow core region along the longitudinal axis and comprising transversally arranged micro-structures configured to provide non-linear optical behaviour to the optical element causing the generation of the broadband radiation

Methodology Applied

Scientific EffectNon-linear optical behavior:

Data Source

PatentUS20240201561A1Optical element for generation of broadband radiation

Publication Date: 2024.06.20 ASML NETHERLANDS BV

AI summary

A monolithic optical element for generating broadband radiation upon receiving input radiation at an input end of the optical element is disclosed, the optical element including: a hollow core region for guiding the input radiation along a longitudinal axis of the optical element towards an output end of the optical element; a cladding region surrounding the core region along the longitudinal axis and including transversally arranged micro-structures configured to provide non-linear optical behavior to the optical element causing the generation of the broadband radiation; and a supporting region surrounding the cladding region along the longitudinal axis of at least part of the optical element, wherein the supporting region has a transversal dimension which is sufficiently large to render the at least part of the optical element substantially rigid.