Monolithic Optical Element for Thermal Laser Evaporation Sealing
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Solution Overview
Problem
Existing optical elements for reaction chambers in thermal laser evaporation systems face issues with material compatibility leading to thermal stress-induced leaks and imprecise mechanical alignment due to the use of different materials for reflector, cooling tubes, and seal sections, requiring expensive solutions and additional alignment measures.
Innovation Solution
A one-piece optical element with a central body having a sealing end for ambient sealing and an optical surface end for radiation reflection/absorption, made from high-reflectivity, high-thermal-conductivity materials like aluminum or copper alloys, which simplifies alignment and sealing by integrating both functions within a single material body.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If different materials are used for reflector section, cooling tubes, and seal section, then each component can be optimized for its specific function, but thermal stress causes leaks at the joints between dissimilar materials
Solution Approach 1:
The patent combines the reflector section and seal section into a single monolithic optical element made from a single material (e.g., aluminum or aluminum alloy). This eliminates the joints between dissimilar materials that cause thermal stress and leaks, while maintaining the functional optimization through integrated design of the reflector and cooling channels.
2Adaptability or versatility
If different materials are used for reflector section, cooling tubes, and seal section, then each component can be optimized for its specific function, but precise mechanical alignment becomes difficult due to weld distortions
Solution Approach 1:
The patent integrates the reflector and seal functions into a single monolithic structure, eliminating weld joints that cause distortion and alignment errors. The single-piece construction ensures precise mechanical alignment between the seal section and reflector section without the need for additional alignment measures.
3Ease of manufacture
If separate components are used for reflector and seal, then manufacturing flexibility is improved, but additional alignment measures and expensive non-standard solutions are required
Solution Approach 1:
The patent combines multiple functions (reflector, seal, cooling) into a single monolithic optical element, eliminating the need for complex assembly procedures and additional alignment measures. The integrated design simplifies manufacturing while reducing device complexity through the elimination of multiple separate components and their associated joining and alignment requirements.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution ensures secure sealing and precise alignment of the optical surface within the reaction chamber, preventing leaks and maintaining high-precision alignment without the need for additional alignment measures, while allowing for efficient operation under high thermal stresses.
Implementation Method 1
the chamber end comprises an optical surface for reflecting and/or shaping and/or absorbing electromagnetic radiation within the reaction chamber
Implementation Method 2
the body consists of aluminum or of an aluminum alloy or of copper or of a copper alloy
Data Source
AI summary
The present invention relates to an optical element (10) for use with a reaction chamber (70), in particular a reaction chamber (70) of a thermal laser evaporation system, the reaction chamber (70) having a chamber wall (72), with a flange (80) of the reaction chamber (70) being arranged at an opening (74) in the chamber wall (72). Further, the present invention relates to a reaction chamber (70), in particular reaction chamber (70) of a thermal laser evaporation system, comprising a chamber wall (72) enclosing a sealable reaction volume, in particular sealable with respect to the ambient atmosphere, the reaction volume fillable with a reaction atmosphere (90), the reaction chamber (70) further comprising a flange (80) arranged at an opening (74) in the chamber wall (72).