Monolithic Optical Assembly for Efficient Waveguide Light Coupling

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Solution Overview

Problem

Existing optical systems suffer from low optical coupling efficiency, reflection of light causing damage and heating, and complex, time-consuming fabrication processes involving separate components like metalens and VCSEL.

Innovation Solution

A monolithically integrated optical assembly with a patterned optical element integrated with the waveguide and coupling element, using CMOS-compatible processes, controls light propagation and avoids separate manufacturing steps.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If multiple separate components (metalens, VCSEL, waveguide assembly) are used and attached together, then the optical system can be assembled, but the optical coupling efficiency is reduced and reflected light damages components

Engineering Contradiction:
Improveoptical coupling efficiencyVSAvoidnumber of separate components
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent merges the metalens, VCSEL, and waveguide assembly into a single monolithically integrated optical assembly. The optical element is formed as an integral part of the waveguide structure using the same semiconductor substrate and fabrication processes, eliminating the need for separate components and their associated attachment processes. This integration directly improves optical coupling efficiency by eliminating interface losses and prevents reflected light damage by removing separate solder joints and adhesive layers that cause reflections.

Inventive Principle:
Principle #5Merging (Combining)

2Manufacturing precision

If complex fabrication processes like electron beam lithography and inductively coupled plasma etching are used, then the metalens can be formed on quartz substrate, but the manufacturing becomes expensive and time-consuming

Engineering Contradiction:
Improveoptical element fabrication precisionVSAvoidmanufacturing speed and cost
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

The patent replaces complex mechanical and chemical fabrication processes (electron beam lithography, inductively coupled plasma etching) with standard semiconductor manufacturing processes. The optical element is formed using photolithography and standard etching techniques on a semiconductor substrate, which are faster, more cost-effective, and better suited for mass production while maintaining the required optical precision.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the substrate material from quartz to a semiconductor material (such as silicon or gallium arsenide) that is compatible with standard CMOS fabrication processes. This parameter change enables the use of high-volume, low-cost semiconductor manufacturing techniques while maintaining the optical properties needed for the metalens and waveguide integration.

Inventive Principle:
Principle #35Parameter changes

3Ease of manufacture

If separate components are attached using soldering and adhesives, then the assembly can be formed, but reflected light travels back and causes damage and heating

Engineering Contradiction:
Improveassembly processVSAvoidreflected light damage and heating
Core Design Contradiction:
Ease of manufactureVSObject-affected harmful factors

Solution Approach 1:

By integrating all optical components into a single monolithic structure, the patent eliminates the solder joints and adhesive layers that create reflective interfaces. The continuous semiconductor material eliminates abrupt refractive index changes at interfaces, preventing reflected light from traveling back through the system and causing damage or heating.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent converts the potential harm of reflected light into a benefit by designing the integrated optical element with controlled impedance matching and graded refractive index profiles. This ensures that light is efficiently coupled into the waveguide mode without generating harmful reflections, turning a potential failure mechanism into a design feature that enhances performance.

Inventive Principle:
Principle #22Blessing in disguise (Convert harm into benefit)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Improves optical coupling efficiency, reduces manufacturing time and cost, and prevents damage from reflected light by integrating components monolithically, using silicon substrates and CMOS processes.

Implementation Method 1

an optical element comprising a pattern of features configured to control a propagation of light incident on the coupling element

Methodology Applied
Scientific EffectDiffraction: Diffraction

Implementation Method 2

an optical element comprising a pattern of features configured to control a propagation of light incident on the coupling element

Methodology Applied
Scientific EffectInterference: Interference

Implementation Method 3

a coupling element configured to couple light into the waveguide

Methodology Applied
Scientific EffectEvanescent wave coupling:

Data Source

PatentUS12596226B2Monolithically integrated optical assembly
Publication Date: 2026.04.07 AUSTRIAMICROSYSTEMS AG
  • US12596226B2 patent drawing
  • US12596226B2 patent drawing
  • US12596226B2 patent drawing

AI summary

A monolithically integrated optical assembly comprising a waveguide configured to receive light and a coupling element configured to couple light into the waveguide. The monolithically integrated optical assembly comprises an optical element comprising a pattern of features configured to control a propagation of light incident on the coupling element.