Monolithic Piezoresistive Sensor for Pressure and Acceleration
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Solution Overview
Problem
Existing micromechanical devices require multiple sensors based on different converter principles to measure various mechanical variables, leading to costly and complex multi-chip applications for simultaneous recording of pressure and acceleration, such as in automotive tire pressure monitoring and side impact sensing.
Innovation Solution
A monolithically integrated micromechanical device with two sensor patterns using the same piezoresistive converter principle on a shared semiconductor material, along with a single two-channel evaluation circuit, allowing for cost-effective production and improved signal processing by integrating diaphragms and seismic masses within the semiconductor material.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple sensors based on different converter principles are used to measure different mechanical variables, then measurement capability is improved, but device complexity and production cost increase
Solution Approach 1:
The patent applies the universality principle by using a single piezoresistive converter principle for both pressure and acceleration sensing. The semiconductor material contains multiple sensor patterns (first sensor pattern for pressure, second sensor pattern for acceleration) that both utilize the piezoresistive effect, allowing one converter principle to serve multiple measurement functions.
Solution Approach 2:
The patent merges multiple sensor functions into a single monolithically integrated device. Both the first sensor pattern and second sensor pattern are produced on the same semiconductor material using the same piezoresistive converter principle, combining pressure sensing and acceleration sensing into one chip rather than using separate chips.
2Adaptability or versatility
If multiple chips are used for different sensor functions, then measurement versatility is improved, but production cost increases
Solution Approach 1:
The patent combines multiple sensor functions that would traditionally require separate chips into a single monolithically integrated device. Both sensor patterns are produced on the same semiconductor material in the same manufacturing process, eliminating the need for multiple chips and reducing production costs.
Solution Approach 2:
The patent uses a universal piezoresistive converter principle for both pressure and acceleration sensing, allowing a single manufacturing process to produce multiple sensor types with different functions from the same semiconductor material.
3Adaptability or versatility
If multiple chips are used for different sensors, then functional versatility is improved, but required space increases
Solution Approach 1:
The patent merges multiple sensor patterns into a single semiconductor chip, integrating both the first sensor pattern for pressure measurement and the second sensor pattern for acceleration measurement in one monolithic structure, thereby reducing the total space required compared to multiple separate chips.
4Adaptability or versatility
If multiple chips are used with separate evaluation circuits, then sensor functionality is improved, but transition resistances increase
Solution Approach 1:
The patent integrates both sensor patterns on the same semiconductor material with a single evaluation circuit, eliminating the need for inter-chip connections and associated transition resistances. The monolithic integration ensures low transition resistances and improved signal integrity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach reduces production costs and space, enhances sensitivity, and improves reliability by using a single chip for both pressure and acceleration sensing, while minimizing susceptibility to static charges, enabling robust and cost-effective simultaneous measurement of multiple mechanical variables.
Implementation Method 1
the functionality of the sensor pattern of the pressure sensor being based on a piezoresistive converter principle for converting a mechanical force into an electrical signal
Data Source
AI summary
A micromechanical device and a method for producing this device are provided, two sensor patterns being provided in the semiconductor material to record two mechanical variables, in particular the pressure and the acceleration. The functionality of both sensor patterns is based on the same predefined converter principle.