Monolithic Thermal Actuation for Deformable Mirror Wavefront Correction

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Solution Overview

Problem

Current deformable mirrors for laser systems are expensive, making large-scale implementation costly, and there is a need for a more affordable solution that can effectively correct wavefront distortions caused by nonlinear crystals.

Innovation Solution

A monolithic actuator-block with a one-dimensional array of thermally expandable actuators is manufactured using wire erosion, which is less costly and suitable for large-scale implementation, allowing for thermal actuation that is sufficient for many practical applications.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If MEMS-based or piezoelectric-based deformable mirrors are used, then wavefront correction performance is improved, but manufacturing cost increases significantly

Engineering Contradiction:
Improvewavefront correction precisionVSAvoidmanufacturing cost
Core Design Contradiction:
Measurement precisionVSEase of manufacture

Solution Approach 1:

The patent replaces complex mechanical actuation systems (MEMS or piezoelectric actuators) with a thermal field-based actuation system. A heating element is integrated into the mirror substrate, and controlled thermal expansion of the substrate material deform the mirror surface to correct wavefront distortions, eliminating the need for separate mechanical actuators

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the physical state or property used for actuation from mechanical displacement (in MEMS/piezoelectric systems) to temperature control. By locally heating regions of the mirror substrate, the thermal expansion parameter is exploited to induce controlled surface deformations for wavefront correction

Inventive Principle:
Principle #35Parameter changes

2Measurement precision

If high-resolution wavefront control with many actuators is implemented, then wavefront correction capability is improved, but device complexity increases

Engineering Contradiction:
Improvewavefront control resolutionVSAvoidactuator array complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent replaces the complex mechanical actuator array with a single integrated heating element embedded in the mirror substrate. The heating element can be patterned to create localized thermal zones that deform the mirror surface, achieving high-resolution wavefront control without the mechanical complexity of multiple actuators

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The mirror substrate serves multiple functions: it provides the reflective surface and simultaneously acts as the actuation medium through thermal expansion. The heating element serves dual purposes of temperature control and wavefront deformation actuation, eliminating the need for separate actuator components

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The monolithic actuator-block devices provide effective wavefront correction at a fraction of the cost of existing MEMS-based and piezoelectric devices, suitable for compensating light-induced degradation and thermal drift in laser systems.

Implementation Method 1

a one-dimensional array of thermally expandable actuators mechanically connecting a rear face of the mirror plate to the base such that at least one of shape, tilt, and location of the front face depends on temperature of the thermally expandable actuators

Methodology Applied
Scientific EffectThermal expansion: Thermal Expansion

Data Source

PatentEP4248254B1Devices for thermally actuating deformable mirror, and associated manufacturing methods
Publication Date: 2025.10.08 COHERENT LASERSYST
  • EP4248254B1 patent drawingFigure 1
  • EP4248254B1 patent drawingFigure 2A~2C
  • EP4248254B1 patent drawingFigure 3A~5

AI summary

A device for thermally actuating a deformable mirror (170) includes a monolithic block (100) that includes a mirror plate (120) having a front face (122F) forming or configured to support a mirror (170), a base (140), and a one-dimensional array of thermally expandable actuators (130). The thermally expandable actuators (130) mechanically connect a rear face of the mirror plate (120) to the base (140) such that shape, tilt, and/or location of the front face (122F) depend on temperature of the thermally expandable actuators (130). The mirror plate (120), base (140), and thermally expandable actuators (130) are defined by slits (110) that span between opposite-facing top (202T) and bottom (202B) surfaces of the monolithic block (100). The monolithic block (100) may be made of a metal and may be manufactured at relatively low cost by wire eroding the slits (110) in a metal block, using a wire that passes through the metal block between its top (202T) and bottom (202B) surfaces.