Monolithic Ultrasonic Flow Meter with Ferroelectric Resonators
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Solution Overview
Problem
Conventional ultrasonic flow meters face challenges in accurately measuring fluid flow speeds in diverse fluids, including dirty or polluted water, petrochemicals, and biological fluids, due to limitations in signal transmission and detection efficiency across varying fluid conditions.
Innovation Solution
The development of an ultrasonic transducer system formed on a semiconductor substrate with arrays of ferroelectric resonators and integrated transmitter and detector circuits, which emit and detect ultrasonic signals within a fluid flow channel, enabling efficient signal transmission and reflection analysis for flow measurement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional ultrasonic flow meters are used, then flow measurement is possible, but measurement precision deteriorates in diverse fluids including dirty or polluted water, petrochemicals, and biological fluids
Solution Approach 1:
The patent employs multiple ultrasonic frequencies to measure flow velocity. By transmitting ultrasonic signals at different frequencies and analyzing the Doppler shift or time-of-flight differences, the system can accurately measure flow speeds across various fluid types including dirty water, petrochemicals, and biological fluids, resolving the contradiction between measurement precision and fluid adaptability
Solution Approach 2:
The ultrasonic flow meter is designed with multi-frequency capability that enables it to function effectively across diverse fluid conditions. The system can adapt its operating parameters to handle different fluid characteristics, making it universally applicable to industrial, environmental, and medical flow measurement applications
2Reliability
If ultrasonic signals are transmitted through diverse fluids, then flow measurement capability is maintained, but signal transmission efficiency deteriorates
Solution Approach 1:
The system dynamically adjusts ultrasonic signal parameters including frequency selection and transmission power based on fluid characteristics. By optimizing these parameters for each measurement condition, the system maintains reliable flow measurement capability while minimizing energy loss and maximizing signal transmission efficiency through diverse fluids
3Productivity
If conventional transducer designs are used, then basic flow measurement is achieved, but detection efficiency deteriorates
Solution Approach 1:
The patent utilizes multiple ultrasonic frequencies with optimized transmission and reception parameters to enhance detection efficiency. By analyzing signal characteristics across different frequencies, the system achieves both high measurement throughput and superior detection precision, resolving the contradiction between productivity and measurement precision
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enhances the accuracy and reliability of fluid flow measurement across different fluid types by improving signal transmission and detection, allowing for precise flow speed estimation and particle detection, even in challenging conditions.
Implementation Method 1
The transmitter circuit is configured to actuate the first ferroelectric resonators to emit an ultrasonic signal into the fluid flow channel
Implementation Method 2
allowing for precise flow speed estimation and particle detection
Data Source
AI summary
An ultrasonic fluid flow measurement system includes an ultrasonic transducer having a semiconductor substrate and an interconnect region over the semiconductor substrate. The ultrasonic transducer has two arrays of ferroelectric resonators in the interconnect region. The arrays of ferroelectric resonators are parallel to a fluid boundary surface of a fluid flow channel attached to the ultrasonic transducer. The ultrasonic transducer includes a transmitter circuit and a detector circuit coupled to the arrays of ferroelectric resonators. The transmitter circuit and the detector circuit include active components in the semiconductor substrate. The ultrasonic fluid flow measurement system may be configured to measure speeds of particles in fluids in the fluid flow channel. The ultrasonic fluid flow measurement system may also be used to measure flow speeds of a fluid in the fluid flow channel.


