Monolithic Wolter Mirror Assembly for Stable Focus Alignment
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Solution Overview
Problem
Separate installation of mirrors in Wolter optics makes alignment of two mirror foci difficult and subjects the optical system to motion effects.
Innovation Solution
A monolithic mirror assembly is developed, integrating an ellipsoid and hyperboloid optical surface in a Wolter mirror configuration, eliminating the need for separate alignment and enhancing stability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If mirrors are separately installed in Wolter optics, then the optical system can be assembled with individual components, but alignment of two mirror foci becomes difficult and the system becomes subject to motion effects
Solution Approach 1:
The patent merges the ellipsoid mirror and hyperboloid mirror into a single monolithic substrate, creating an integrated mirror assembly where the two optical surfaces are permanently fixed relative to each other. This eliminates the alignment problem between separate mirrors while maintaining the Wolter optic configuration, as the monolithic structure ensures precise and stable focal point alignment.
2Ease of manufacture
If mirrors are separately installed in Wolter optics, then the optical system can be assembled with individual components, but the system becomes subject to motion effects
Solution Approach 1:
By combining both mirror surfaces into one monolithic substrate, the patent eliminates relative motion between the ellipsoid and hyperboloid mirrors. The single substrate structure ensures that both optical surfaces move together as a unified unit, preventing motion-induced misalignment and improving long-term stability of the optical system.
3Adaptability or versatility
If mirrors are separately installed, then individual mirror adjustment is possible, but alignment complexity increases
Solution Approach 1:
The monolithic integration of both mirror surfaces into a single substrate eliminates the need for complex alignment procedures between separate mirrors. The unified structure ensures that the optical paths are inherently aligned, reducing alignment complexity while maintaining the adaptability of the Wolter optic configuration for various optical systems.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The integrated mirror assembly facilitates easier alignment, reduces absorption losses, and provides better long-term stability in extreme ultraviolet systems.
Implementation Method 1
the ellipsoid optical surface and the hyperboloid optical surface are arranged in a Wolter mirror configuration
Data Source
AI summary
A mirror assembly is disclosed. The mirror assembly includes an ellipsoid optical surface. The mirror assembly includes a hyperboloid optical surface, wherein the ellipsoid optical surface and the hyperboloid optical surface are arranged in a Wolter mirror configuration. The mirror assembly includes a substrate. The substrate includes a first portion, wherein the ellipsoid optical surface is located on the first portion of the substrate. The substrate includes a second portion, wherein the hyperboloid optical surface is located on the second portion of the substrate, wherein the first portion and the second portion form a monolithic body.