Monomer-Based Resist Composition for High-Resolution Patterning
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Solution Overview
Problem
Current methods for producing β-(meth)acryloyloxy-γ-butyrolactone compounds face challenges such as stability, handling difficulties, high costs, and the need for special reactor setups, making large-scale industrial production inefficient.
Innovation Solution
A method involving the rearrangement of (meth)acryloyloxy groups to prepare β-(meth)acryloyloxy-γ-butyrolactone and β-(meth)acryloyloxy-γ-valerolactone compounds in high yields without forming intermediates like β-hydroxylactone or β-halolactone, using metal enolate reagents and acyloxyketone compounds, which can be used to create a monomer for improved resist compositions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If conventional methods are used to produce β-(meth)acryloyloxy-γ-butyrolactone compounds, then the compounds can be produced, but the production process suffers from stability issues, handling difficulties, high costs, and requires special reactor setups
Solution Approach 1:
The patent changes the reaction parameters by using a one-pot two-step process that converts the intermediate directly in situ without isolation. The reaction conditions are optimized to maintain stability while improving ease of manufacture by eliminating the need for special reactor setups and complex handling procedures
Solution Approach 2:
The patent extracts the problematic intermediate isolation step from the production process. By eliminating the need to isolate and handle β-hydroxylactone or β-halolactone intermediates, the method removes the sources of instability and handling difficulties while maintaining product quality
2Productivity
If conventional multi-step methods with intermediate isolation are used, then the production process is established, but the process becomes complex, costly, and less efficient for large-scale production
Solution Approach 1:
The patent merges the intermediate formation and conversion steps into a single continuous process. The β-hydroxylactone or β-halolactone intermediate is converted in situ to the final β-(meth)acryloyloxy-γ-butyrolactone product without isolation, thereby combining multiple operations into one streamlined process that improves productivity while reducing complexity
Solution Approach 2:
The patent performs preliminary preparation of the intermediate within the same reaction system that will subsequently convert it to the final product. This preliminary action is integrated into the overall process rather than being a separate step, reducing both equipment complexity and production time
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The resulting monomer-based resist composition exhibits enhanced performance with improved dissolution contrast, acid diffusion control, and reduced roughness in both alkaline and organic solvent developments, suitable for high-resolution pattern formation.
Implementation Method 1
reacting a compound having the general formula (9) with a base or a metal selected from Group 1A, 2A and 2B metals to form a metal enolate reagent, and reacting the metal enolate reagent with an acyloxyketone compound having the general formula (8)
Data Source
AI summary
A monomer (1) is prepared by reacting a compound (9) with a base or metal to form a metal enolate reagent, and reacting the metal enolate reagent with an acyloxyketone compound (8). A polymer derived from the monomer is used as base resin to formulate a resist composition, which is shelf stable and displays a high dissolution contrast, controlled acid diffusion and low roughness in forming positive pattern via alkaline development and in forming negative pattern via organic solvent development.