MOS Capacitor Oxide Breakdown for On-Chip Temperature Threshold Sensing

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Solution Overview

Problem

Conventional on-chip thermal sensors face issues such as real estate allocation, high power consumption, and scaling difficulties, making them unsatisfactory for accurate temperature monitoring in integrated circuits.

Innovation Solution

A temperature-sensing device utilizing MOS capacitors with varying oxide layer thicknesses, each exhibiting distinct breakdown behaviors at different temperatures, coupled with a control logic circuit to determine temperature based on conductive changes in these capacitors.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If conventional on-chip thermal sensors are used, then temperature monitoring capability is provided, but real estate allocation is excessive and power consumption is high

Engineering Contradiction:
Improvetemperature monitoring capabilityVSAvoidreal estate allocation
Core Design Contradiction:
Measurement precisionVSArea of stationary object

Solution Approach 1:

The patent combines multiple functions (temperature sensing, voltage control, and signal output) into a single integrated sensor device. The sensor device includes a sensing element, control circuitry, and output mechanism all integrated together, eliminating the need for separate components and reducing overall real estate allocation on the chip.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The sensor device is designed to perform multiple functions: sensing temperature changes, receiving voltage control signals, adjusting its operation mode, and outputting temperature data. This multi-functionality reduces the need for separate dedicated components for each function, thereby reducing total area requirements.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Measurement precision

If conventional on-chip thermal sensors are used, then temperature monitoring capability is provided, but power consumption is high

Engineering Contradiction:
Improvetemperature monitoring capabilityVSAvoidpower consumption
Core Design Contradiction:
Measurement precisionVSUse of energy by stationary object

Solution Approach 1:

The sensor device dynamically adjusts its operation based on received voltage control signals. The control circuitry can modify the sensing element's operation mode or measurement frequency based on actual thermal management needs, reducing power consumption during periods when intensive temperature monitoring is not required while maintaining accuracy when needed.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The device changes its operational parameters (such as measurement frequency, sensing element activation, or output rate) based on control voltages received. This allows the sensor to operate at lower power levels under normal conditions and switch to higher precision modes only when temperature anomalies are detected or thermal management is critical.

Inventive Principle:
Principle #35Parameter changes

3Measurement precision

If conventional on-chip thermal sensors are used, then temperature monitoring is achieved, but integration with other components is difficult

Engineering Contradiction:
Improvetemperature monitoringVSAvoidintegration with other components
Core Design Contradiction:
Measurement precisionVSEase of manufacture

Solution Approach 1:

The sensor device integrates the sensing element, control circuitry, and output mechanisms into a single unified component that can be easily incorporated alongside other integrated circuit components. This merged design simplifies the integration process compared to combining separate temperature sensors, voltage sources, and output circuits.

Inventive Principle:
Principle #5Merging (Combining)

4Use of energy by stationary object

If lightweight and power-efficient sensors are used, then power consumption is reduced, but measurement accuracy may be compromised

Engineering Contradiction:
Improvepower efficiencyVSAvoidtemperature sensing accuracy
Core Design Contradiction:
Use of energy by stationary objectVSMeasurement precision

Solution Approach 1:

The sensor device dynamically adjusts its measurement and operation modes based on control voltages. During normal operation, it uses lower-power measurement modes with sufficient accuracy. When temperature thresholds are approached or anomalies detected, it automatically switches to higher-precision measurement modes, ensuring accuracy is maintained when critical while optimizing power consumption during normal conditions.

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Provides accurate and power-efficient temperature monitoring by leveraging the unique conductive behaviors of MOS capacitors with different oxide layers, enhancing thermal management and security in integrated circuits.

Implementation Method 1

A temperature-sensing device is disclosed that includes a first capacitor including a first oxide layer with a first thickness; a second capacitor including a second oxide layer with a second thickness, wherein the second thickness is different from the first thickness

Methodology Applied
Scientific EffectOxide breakdown: Avalanche Breakdown

Data Source

PatentUS12618721B2Capacitor-based temperature-sensing device
Publication Date: 2026.05.05 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US12618721B2 patent drawing
  • US12618721B2 patent drawing
  • US12618721B2 patent drawing

AI summary

A temperature-sensing device configured to monitor a temperature is disclosed. The temperature-sensing device includes: a first capacitor comprising a first oxide layer with a first thickness; a second capacitor comprising a second oxide layer with a second thickness, wherein the second thickness of the second oxide layer is different from the first thickness of the first oxide layer; and a control logic circuit, coupled to the first and second capacitors, and configured to determine whether the monitored temperature is equal to or greater than a threshold temperature based on whether at least one of the first and second oxide layers breaks down.