MOS Gas Sensor Self-Temperature Compensation via Frequency-Dependent Impedance

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Solution Overview

Problem

Conventional metal oxide semiconductor (MOS) gas sensors face significant challenges in maintaining accuracy across varying ambient temperatures due to sensitivity issues, requiring separate temperature sensors for correction, while impedance measurements offer improved detection and linearity but fail to address temperature effects without additional sensors.

Innovation Solution

A gas sensing assembly and method that utilize a sensing material with electrodes and a heating element to control temperature, applying an electric field at alternating current frequencies, allowing the sensing circuitry to measure electrical responses and detect gases without the need for a separate temperature sensor, employing dielectric excitation for self-compensation against ambient temperature fluctuations.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a separate temperature sensor is added to correct temperature effects on MOS gas sensors, then measurement precision is improved, but device complexity increases

Engineering Contradiction:
Improvegas sensing accuracyVSAvoidsensor structure
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The MOS sensor performs self-temperature-compensation by utilizing its own impedance characteristics. The sensor's impedance response at different frequencies provides information about both gas concentration and temperature effects, allowing the system to self-correct temperature drift without external temperature sensors or additional compensation components.

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The invention changes the measurement parameter from simple resistance to frequency-dependent impedance. By measuring impedance across multiple frequencies, the system captures temperature-dependent behavioral changes of the MOS sensor, transforming the temperature sensitivity problem into useful measurement information that enables self-compensation.

Inventive Principle:
Principle #35Parameter changes

2Measurement precision

If impedance measurement is used instead of resistance readout, then measurement precision is improved, but the ability to handle temperature effects worsens

Engineering Contradiction:
Improvedetection limit and linearityVSAvoidtemperature sensitivity
Core Design Contradiction:
Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The invention adds the frequency dimension to the impedance measurement. Instead of measuring only magnitude (resistance or impedance), the system measures impedance across a spectrum of frequencies. This additional dimensional information allows separation of gas-related impedance changes from temperature-related impedance changes, resolving the temperature sensitivity problem while maintaining the benefits of impedance measurement.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables accurate gas sensing and concentration measurement across different temperatures without a separate temperature sensor, providing self-correction for temperature effects through frequency-dependent impedance responses, enhancing sensor accuracy and simplifying calibration.

Implementation Method 1

a heating element that controls a temperature of the sensing material

Methodology Applied
Scientific EffectJoule heating: Joule Heating

Implementation Method 2

sensing circuitry to control application of the electric field to the sensing material via the electrodes at an alternating current frequency range

Methodology Applied
Scientific EffectDielectric excitation: Dielectric

Data Source

PatentUS11567020B2Gas sensing assembly and method
Publication Date: 2023.01.31 GE INFRASTRUCTURE TECH LLC
  • US11567020B2 patent drawing
  • US11567020B2 patent drawing
  • US11567020B2 patent drawing

AI summary

A gas sensing assembly includes a sensing material to be placed in contact with a fluid sample, electrodes coupled with the sensing material that apply an electric field to the sensing material across the electrodes, a heating element that controls a temperature of the sensing material while the sensing material is in contact with the fluid sample, and sensing circuitry to control application of the electric field to the sensing material via the electrodes at an alternating current frequency range in the presence of an uncontrolled ambient temperature and at an elevated alternating current frequency range. The sensing circuitry measures one or more electrical responses of the sensing material responsive to applying the electric field at the alternating current frequency range and at the elevated alternating current frequency range. The sensing circuitry detects presence of a gas in the fluid sample based on the one or more electrical responses.