MOS Transistor Threshold Voltage Measurement Circuit

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Solution Overview

Problem

Existing methods for determining the threshold voltage of transistors, such as binary search and interpolation, are slow and require multiple force/measure cycles due to the need to sweep input voltages across ranges to narrow in on the threshold voltage.

Innovation Solution

Implementing an operational amplifier-based measurement circuit that sets the gate voltage to 0 V and uses a constant current source to maintain a threshold current, allowing direct measurement of the threshold voltage through feedback, reducing the need for iterative adjustments and enabling measurement in both saturation and linear modes with a single force/measure cycle.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If binary search or interpolation techniques are used to determine threshold voltage, then measurement accuracy is achieved, but measurement time increases due to multiple force/measure cycles

Engineering Contradiction:
Improvethreshold voltage measurement accuracyVSAvoidmeasurement time
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The operational amplifier circuit is pre-configured with feedback connections to the transistor gate, and the constant current source is pre-established at the transistor source. This preliminary setup eliminates the need for iterative voltage sweeping, allowing direct measurement of threshold voltage in a single force/measure cycle while maintaining measurement accuracy.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The operational amplifier uses feedback from the transistor drain to automatically adjust the gate voltage to maintain the threshold current condition. This feedback mechanism replaces manual iterative adjustment with automated real-time control, significantly reducing measurement time while preserving measurement precision.

Inventive Principle:
Principle #23Feedback

2Measurement precision

If iterative voltage sweeping is performed to narrow in on threshold voltage, then accurate threshold voltage determination is achieved, but productivity decreases due to slow measurement speed

Engineering Contradiction:
Improvethreshold voltage determination accuracyVSAvoidwafer-level testing efficiency
Core Design Contradiction:
Measurement precisionVSProductivity

Solution Approach 1:

The measurement circuit is pre-configured with the operational amplifier feedback loop and constant current source established before measurement begins. This preliminary setup enables direct threshold voltage measurement without iterative sweeping, dramatically improving wafer-level testing efficiency while maintaining accurate threshold voltage determination.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The manual iterative voltage sweeping process is replaced with an automated operational amplifier feedback system. This substitution eliminates the time-consuming mechanical sweeping process while maintaining measurement accuracy, thereby improving productivity in wafer-level electrical testing.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Measurement precision

If multiple force/measure cycles are used to sweep input voltages, then threshold voltage measurement is achieved, but device complexity increases due to required circuit configurations

Engineering Contradiction:
Improvethreshold voltage measurementVSAvoidcircuit configuration complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The operational amplifier-based circuit is designed to measure threshold voltage in both saturation and linear modes using the same basic configuration. This multi-functional design eliminates the need for separate circuit configurations for different operating modes, reducing device complexity while maintaining measurement precision.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The circuit is pre-configured with the operational amplifier feedback loop and constant current source, which can directly measure threshold voltage without requiring multiple force/measure cycles or complex switching arrangements. This preliminary configuration simplifies the overall circuit design while achieving accurate threshold voltage measurement.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach significantly reduces the time required to measure threshold voltage, improving the efficiency of wafer-level electrical testing by allowing direct and rapid determination of transistor parameters with minimal cycles, enhancing the speed and accuracy of semiconductor product evaluation.

Implementation Method 1

an operational amplifier is provided having a first input, a second input, and an output. The output of the operational amplifier is coupled to the gate of the transistor, the first input of the operational amplifier is coupled to a reference voltage, and the second input of the operational amplifier is coupled to the source of the transistor

Methodology Applied
Scientific EffectFeedback: Feedback

Implementation Method 2

A constant current source is coupled to the source of the transistor. A parameter of the transistor is measured

Methodology Applied
Scientific EffectConstant current source:

Data Source

PatentUS8779796B2Method and apparatus for device parameter measurement
Publication Date: 2014.07.15 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US8779796B2 patent drawing
  • US8779796B2 patent drawing
  • US8779796B2 patent drawing

AI summary

A method of measuring a parameter of a device in a circuit includes providing a device under test (DUT). The DUT includes a metal oxide semiconductor (MOS) transistor having a gate, a source, and a drain coupled to a first voltage supply node. The method further includes coupling a constant current source to the source of the transistor, coupling an operational amplifier to the transistor, and measuring a parameter of the transistor.