Motion Capture Procedure Detection for Semiconductor Step Compliance
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Solution Overview
Problem
Human workers in semiconductor fabrication processes often fail to consistently perform installation and monitoring steps, leading to potential quality issues due to missed checks and unrecorded times, which are not effectively addressed by existing monitoring systems.
Innovation Solution
A procedure detection system utilizing computer vision and graph algorithms to automatically detect and record human actions through motion capture, generating pose position signals to verify the completion of predetermined tasks and alert when necessary actions are missed.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If human workers manually perform installation and monitoring steps, then operational flexibility is maintained, but consistency and reliability of procedure execution deteriorate
Solution Approach 1:
The patent replaces manual mechanical monitoring and recording operations with an automated computer vision system. The system uses imaging devices to capture images, graph algorithms to detect human poses and actions, and automated logic to determine whether predetermined steps are performed, eliminating reliance on human workers to manually track and record procedure completion.
Solution Approach 2:
The system enables self-monitoring and self-recording of procedure execution. The automated detection system independently observes worker actions, processes the visual data through graph algorithms, and automatically determines compliance without requiring human intervention for verification or record-keeping.
2Loss of information
If existing monitoring systems are used to track worker actions, then some procedure compliance is recorded, but real-time detection and alerting of missed actions deteriorate
Solution Approach 1:
The patent implements real-time feedback through automated alerting when predetermined steps are not performed. The system continuously monitors worker actions, compares them against the required procedure sequence, and immediately generates alerts when deviations are detected, providing timely feedback to correct compliance issues.
Solution Approach 2:
The system performs preliminary detection and determination of procedure compliance in real-time rather than relying on post-process review. By continuously analyzing worker actions as they occur and immediately identifying missed steps, the system prevents information loss and enables immediate corrective action.
3Measurement precision
If manual recording of procedure steps is performed, then operational simplicity is maintained, but measurement precision and reliability of action tracking deteriorate
Solution Approach 1:
The patent replaces imprecise manual recording with automated computer vision-based detection. The system uses imaging devices to capture precise visual data, graph algorithms to accurately detect human poses and distinguish between different body parts, and automated logic to precisely determine whether specific actions were performed, achieving high measurement precision in action tracking.
Data Source
AI summary
A method of automatically detecting whether a procedure in a scheduled process has been performed is disclosed. The method includes: capturing images of a person engaged in a plurality of predetermined steps in the scheduled process; estimating a human pose of the person in the captured images that includes a plurality of body parts of the human pose; tracking movement of the plurality of body parts of the human pose; generating a movement signal based on the tracked movement of the plurality of body parts; determining based on the movement signal whether a predetermined step of the plurality of predetermined steps in the scheduled process has been performed by the person; and recording a time at which the predetermined step of the plurality of predetermined steps in the scheduled process has been performed by the person when it has been determined that the predetermined step has been performed.