High-Speed Motion Stage Active Friction Vibration Suppression
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Solution Overview
Problem
Existing high-speed motion stage devices face challenges in rapidly suppressing inertial vibration, with passive vibration reduction methods being ineffective and active control methods being complex and inflexible.
Innovation Solution
An active vibration reduction method involving a vibration reduction device that contacts with the motion body or driving device to generate a friction force orthogonal to the motion direction, using telescopic control and motion parameters to adjust the friction force for rapid suppression.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If a control method is used for vibration reduction, then vibration suppression is achieved, but parameter adjustment becomes complex and adaptability deteriorates
Solution Approach 1:
The vibration reduction device automatically determines the appropriate vibration reduction mode based on detected motion parameters (velocity, acceleration, jerk) without requiring manual parameter adjustment. The system self-adapts to different motion conditions by selecting from pre-defined modes (first mode for high velocity, second mode for high acceleration, third mode for high jerk), eliminating the need for complex parameter tuning while maintaining effective vibration suppression
Solution Approach 2:
The vibration reduction device dynamically switches between different vibration reduction modes based on real-time motion parameters. The control strategy changes from static to dynamic adaptation, where the device transitions between first, second, and third vibration reduction modes according to whether velocity, acceleration, or jerk exceeds respective thresholds, thereby improving adaptability without increasing operational complexity
2Object-affected harmful factors
If a passive vibration reduction structure is added, then vibration reduction capability is provided, but suppression effect under high-speed motion remains unsatisfactory
Solution Approach 1:
The patent transforms the passive vibration reduction structure into an active system by introducing dynamic control based on motion parameters. The device transitions from a static passive structure to an active system that switches between different vibration reduction modes (first mode with damping coefficient c1, second mode with c2, third mode with c3) based on real-time velocity, acceleration, and jerk conditions, thereby achieving effective suppression under high-speed motion conditions
Solution Approach 2:
The vibration reduction device changes its damping parameters dynamically based on motion conditions. By selecting different vibration reduction modes with different damping coefficients (c1, c2, c3) according to motion parameters, the system adapts to varying speed conditions and achieves satisfactory vibration suppression效果 under high-speed motion where passive structures fail
3Object-affected harmful factors
If the action end continuously contacts the motion body, then vibration suppression is maintained, but motion accuracy deteriorates due to interference
Solution Approach 1:
The vibration reduction device employs periodic or conditional contact through telescopic expansion and contraction based on detected vibration conditions. Rather than continuous contact, the device expands to contact the motion body only when vibration thresholds are exceeded, then contracts when vibration is suppressed, thereby maintaining vibration suppression effectiveness while eliminating unnecessary interference with motion accuracy during normal operation
Solution Approach 2:
The telescopic structure acts as an intermediary mechanism between the fixed vibration reduction device and the motion body. By expanding and contracting the telescopic portion, the device mediates contact only when needed, allowing vibration suppression through controlled friction while avoiding continuous interference with the motion body's positioning accuracy
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method effectively suppresses inertial vibration without interfering with the motion, ensuring accuracy and adaptability under varying conditions, achieving rapid and flexible vibration reduction.
Implementation Method 1
controlling an action end of the vibration reduction device to contact with the motion body of the motion stage or contact with a driving device for driving the motion body to move based on the vibration reduction mode, so that a contact friction force used for suppressing vibration of the motion body is generated
Data Source
AI summary
A rapid active vibration reduction method for a high-speed motion stage includes acquiring motion parameters of a motion body of the motion stage in current motion; determining a vibration reduction mode of a vibration reduction device according to the motion parameters; and controlling an action end of the vibration reduction device to contact with the motion body of the motion stage or contact with a driving device for driving the motion body to move based on the vibration reduction mode, so that a contact friction force used for suppressing vibration of the motion body is generated. Realizing vibration reduction by means of active friction can reduce vibration of the motion body in a specific stage needing vibration reduction, and the action end of the vibration reduction device does not need to contact with the motion body or does not need to contact with the driving device before vibration reduction.