Motor Bracket with Integrated Fluid Path for Thermal Management

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Solution Overview

Problem

In substrate processing apparatuses, motors within sealed structures face heat dissipation challenges due to their sealed environment, leading to elevated surface temperatures and potential thermal deformation of nearby components, and existing cooling solutions are either ineffective or costly.

Innovation Solution

A motor attachment bracket with a plate-shaped motor mounting portion and a fluid path for circulating cooling fluid, which is integrated into a metal member, allowing for efficient heat dissipation without increasing the motor's installation space or complexity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a motor is installed inside a sealed structure for waterproofness, then waterproofness is improved, but heat dissipation deteriorates leading to elevated surface temperatures

Engineering Contradiction:

ImprovewaterproofnessVSAvoidmotor surface temperature

Core Design Contradiction:

ReliabilityVSTemperature

Solution Approach 1:

The sealed structure is segmented into two functional zones: a waterproof sealed chamber for the motor and a separate cooling fluid path system. This allows the motor to remain in the sealed environment while heat is actively removed through the integrated fluid paths, resolving the contradiction between maintaining waterproofness and enabling heat dissipation.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

A cooling fluid acts as an intermediary medium between the motor heat source and the external environment. The fluid circulates through paths integrated into the bracket, absorbing heat from the motor without compromising the sealed structure, thus enabling thermal management while preserving waterproofness.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Device complexity

If radiation-cooling is used for heat dissipation in a sealed structure, then no additional cooling components are needed, but cooling efficiency is insufficient leading to thermal deformation of nearby components

Engineering Contradiction:

Improvecooling structure complexityVSAvoidcomponent thermal stability

Core Design Contradiction:

Device complexityVSReliability

Solution Approach 1:

The cooling function is merged with the motor attachment bracket structure itself. The fluid paths are integrated directly into the bracket, combining the mounting function with the cooling function in a single component, thus improving cooling efficiency without significantly increasing overall system complexity.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

A liquid cooling system using circulating fluid is implemented through the bracket structure. This hydraulic cooling approach provides superior heat removal capability compared to radiation-cooling, preventing thermal deformation of nearby components while maintaining reasonable structural complexity.

Inventive Principle:

Principle #29Pneumatics and hydraulics

3Temperature

If existing cooling solutions are implemented, then heat dissipation is improved, but installation space or system complexity increases

Engineering Contradiction:

Improvemotor cooling efficiencyVSAvoidcooling system complexity

Core Design Contradiction:

TemperatureVSDevice complexity

Solution Approach 1:

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The motor attachment bracket is designed with multi-functionality: it provides mechanical support for the motor, ensures waterproof sealing, and simultaneously serves as the cooling system through integrated fluid paths. This universal design improves cooling efficiency without requiring separate dedicated cooling components, thereby limiting increases in system complexity.

Inventive Principle:

Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively cools the motor while reducing costs and space requirements, preventing thermal deformation of nearby components and maintaining waterproofing.

Implementation Method 1

cooling heat generated by the driving of the motor provided in the installation place with the sealed structure is performed by radiation-cooling that spontaneously radiates the heat to components or a space (air) around the motor

Methodology Applied

Scientific EffectHeat transfer: Conduction (thermal)

Implementation Method 2

A fluid path in which a cooling fluid is circulated is formed in a metal member formed with the motor mounting portion

Methodology Applied

Scientific EffectConvection: Convection

Data Source

PatentUS10680496B2Motor attachment bracket, motor attachment structure, and substrate processing apparatus

Publication Date: 2020.06.09 EBARA CORP

AI summary

Various examples, relating to motor attachment, a motor attachment structure, substrate processing apparatus are disclosed. The present disclosure exemplifies a motor attachment bracket including a plate-shaped motor mounting portion which an output shaft insertion hole through which an output shaft of a motor is inserted penetrates, and to which the motor the output shaft of which is inserted through the output shaft insertion hole is fixed. A fluid path in which a cooling fluid is circulated is formed in a metal member formed with the motor mounting portion, a motor attachment structure using the motor attachment bracket, and a substrate processing apparatus.