Motor Commutation for 1D and 2D Force Control
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Solution Overview
Problem
Conventional substrate processing apparatuses face limitations in throughput due to the handling rate of transport robots, which require numerous active components and have limited degrees of freedom, necessitating improvements in motor commutation to enhance propulsion and guidance capabilities.
Innovation Solution
The method involves calculating an adjustment electrical angle to utilize common commutation equations for producing both one and two-dimensional forces in motors, allowing for independent control of propulsion and guidance forces in multiple dimensions using Lorentz and Maxwell forces.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If conventional two-axis or three-axis transport robots are used, then substrates can be transported between processing modules, but the throughput is limited by the handling rate and the robot has limited degrees of freedom
Solution Approach 1:
The patent transitions from conventional two-axis or three-axis robotic transport to a five-axis magnetic levitation transport system. By adding two additional degrees of freedom (vertical axis and rotational axis), the system achieves superior adaptability and handling capability, enabling complex substrate transport paths and orientations that directly improve throughput in substrate processing apparatuses.
Solution Approach 2:
The patent replaces conventional mechanical robotic arms with joints, motors, and encoders with a magnetic levitation-based transport system. This substitution eliminates mechanical constraints and friction, providing unlimited degrees of freedom and significantly higher handling rates, thereby resolving the contradiction between productivity and adaptability.
2Ease of operation
If conventional robots with numerous active components are used, then power and control can be provided, but the system complexity increases and the envelope of the transport chamber must be breached
Solution Approach 1:
The patent replaces mechanical robotic components (joints, motors, encoders) with a magnetic levitation system controlled by commutation equations. This substitution dramatically reduces the number of active mechanical components while maintaining full power and control capabilities, simplifying the overall system architecture.
Solution Approach 2:
The patent employs a universal commutation equation framework that can produce both one-dimensional and two-dimensional forces in the motor. This multi-functional approach allows a single control system to handle various transport scenarios without requiring multiple specialized components, thereby reducing system complexity.
3Manufacturing precision
If separate commutation equations are used for one-dimensional and two-dimensional forces, then precise force control is achieved, but the control system complexity increases
Solution Approach 1:
The patent develops a universal commutation equation that can simultaneously produce one-dimensional forces (Fx) and two-dimensional forces (Fx, Fy) by adjusting the electrical angle parameter. This unified approach maintains precise force control while eliminating the need for separate control equations, thereby reducing control system complexity.
Solution Approach 2:
The patent achieves different force control modes by changing the electrical angle parameter in the commutation equations. By adjusting this single parameter, the system can transition between one-dimensional propulsion control and two-dimensional combined propulsion-guidance control, maintaining precision without increasing control complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables efficient and precise control of motor forces, enhancing the throughput and flexibility of substrate processing by decoupling propulsion and guidance forces, thereby improving the handling capabilities of the transport apparatus.
Implementation Method 1
producing forces in the motor in at least one dimension, wherein the adjustment electrical angle is determined so that commutation equations for producing forces in the motor in but one of the at least one dimension are common with commutation equations for simultaneously producing forces in the motor in two of the at least one dimension
Implementation Method 2
enhancing the throughput and flexibility of substrate processing by decoupling propulsion and guidance forces
Data Source
AI summary
A method of commutating a motor includes calculating an adjustment electrical angle, and utilizing the adjustment electrical angle in a common set of commutation equations so that the common set of commutation equations is capable of producing both one and two dimensional forces in the motor.