Motorized Rotation Assembly for Digital Photolithography
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Solution Overview
Problem
Conventional digital photolithography systems face challenges in achieving precise angle settings and image stability due to manual angle setting operations, which provide limited resolution and introduce serviceability issues.
Innovation Solution
A motorized rotation assembly is introduced, which includes a kinematic socket with a sphere as a pivot point for tip and tilt movements and a motor for rotating the exposure units. This assembly provides high-resolution rotation control and automated image clocking, improving image stability and focus.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If manual angle setting operations are used, then the system structure remains simple, but the angle setting precision is limited and image stability deteriorates
Solution Approach 1:
The patent replaces manual mechanical angle setting operations with a motorized rotation assembly that provides automated, high-resolution rotation control. The motorized system substitutes human-operated mechanical adjustments with an automated motor-driven mechanism, achieving three micro-radian resolution while eliminating serviceability issues associated with manual operations.
Solution Approach 2:
The patent introduces a dynamic motorized rotation assembly that enables precise, automated adjustment of exposure unit angles. The system transitions from static manual positioning to dynamic motor-controlled rotation, allowing real-time optimization of angle settings and maintaining image stability through automated clocking operations.
2Reliability
If motorized rotation assembly is introduced, then angle setting precision and image stability improve, but the device complexity increases
Solution Approach 1:
The motorized rotation assembly performs multiple functions: it provides high-resolution angle setting, enables automated image clocking, and maintains optical focus across the projected image. By consolidating these functions into a single integrated assembly, the patent improves image stability without proportionally increasing overall system complexity.
Solution Approach 2:
The motorized rotation assembly enables automated image clocking operations, allowing the system to self-adjust and maintain optimal alignment without continuous manual intervention. This automation improves reliability by eliminating human error and maintaining consistent image stability throughout operation.
3Productivity
If manual angle setting is used, then the device complexity is low, but productivity and precision are limited
Solution Approach 1:
The patent replaces manual mechanical angle setting with an automated motorized rotation system that provides three micro-radian resolution. This substitution dramatically improves productivity by enabling rapid, precise angle adjustments and automated clocking operations, eliminating the time-consuming nature of manual operations.
Solution Approach 2:
The motorized rotation assembly enables precise control of rotation parameters, achieving three micro-radian resolution that far exceeds manual capability. The system can rapidly adjust angular parameters and maintain optimal settings, significantly improving both productivity and measurement precision compared to manual operations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The motorized rotation assembly enhances the precision of angle settings to a three micro-radian resolution, improves image stability by providing a fourth degree of freedom for rotation, and maintains optical focus across the entire projected image.
Implementation Method 1
a kinematic socket configured to support the exposure unit, the kinematic socket comprising a socket seat and a sphere received in the socket seat, wherein the socket seat is configured to support a load of the exposure unit during translational movement and the sphere is a pivot point for tip and tilt movement
Implementation Method 2
a motor configured to rotate the one or more exposure unit via the kinematic socket
Data Source
AI summary
Embodiments of the disclosure relate to digital lithography systems and components thereof. Digital lithography systems may include a rotation assembly for an exposure unit, including a kinematic socket configured to support the exposure unit, the kinematic socket having a socket seat and a sphere received in the socket seat, wherein the socket seat is configured to support a load of the exposure unit during translational movement and the sphere is a pivot point for tip and tilt movement; and a motor configured to rotate the one or more exposure unit via the kinematic socket. The rotation assembly may provide a point of contact for the exposure unit together with two additional points of contact that stabilize movement of the exposure unit. Also disclosed are methods of preparation and use of such systems and components.