Motorized Showerhead Tilt Assembly With Axial Plunge Coupling
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Solution Overview
Problem
Conventional showerhead and cooling plate assemblies in substrate processing systems require manual adjustment, which is time-consuming, costly, and prone to errors, necessitating skilled personnel and lengthy cooling/heating cycles, leading to potential wafer scrap.
Innovation Solution
An automated tilting system using tilt adjustment motors and couplings, such as an axial plunge coupler-screw interface, allows for precise, automated adjustment of the showerhead and cooling plate orientations, incorporating a bellows for vacuum sealing and load compensators to maintain chamber integrity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If manual adjustment of showerhead orientation is performed, then the showerhead can be tilted to desired orientation, but the process requires skilled personnel and takes several hours
Solution Approach 1:
The patent replaces manual mechanical adjustment with an automated motorized tilt adjustment system. Motors are integrated into the showerhead assembly to automatically tilt the showerhead to predetermined orientations, eliminating the need for manual operation by skilled personnel and reducing adjustment time from several hours to minutes.
Solution Approach 2:
The showerhead assembly is designed with self-contained motorized tilt adjustment capability, allowing the system to adjust its own orientation automatically without requiring external manual intervention. The motors are integrated directly into the showerhead structure, enabling autonomous repositioning to different orientations.
2Measurement precision
If manual gap check and metrology verification are performed during tilting, then desired orientation can be verified, but the process requires expert presence and multiple steps
Solution Approach 1:
The system incorporates predetermined orientations that are pre-programmed into the motorized tilt adjustment system. These orientations are determined in advance through design and testing, allowing the showerhead to be automatically positioned to correct orientations without requiring real-time manual measurement or expert verification during the adjustment process.
3Manufacturing precision
If cooling down and heating up cycles are performed during manual adjustment, then the showerhead components can be adjusted, but the process takes several hours
Solution Approach 1:
The motorized tilt adjustment system enables orientation changes without requiring thermal cycling. The automated mechanical adjustment can be performed on the assembled showerhead components without needing to cool down or heat up the brazed joints, eliminating the several-hour thermal cycles while maintaining orientation precision.
4Strength
If brazed cooling plate components are used, then the assembly can be manufactured, but the extra complexity and inspection add manufacturing time and cost
Solution Approach 1:
The motorized tilt adjustment system is integrated into the brazed cooling plate assembly, combining the structural strength benefits of brazing with automated adjustment capability. The motors are mounted on the cooling plate, allowing the strong brazed construction to be maintained while adding automated functionality without requiring separate inspection processes.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables quick, accurate, and automated orientation adjustments of showerhead components, reducing manufacturing time and costs, minimizing errors, and ensuring consistent processing results without breaking the vacuum seal.
Implementation Method 1
the coupling configured such that automated rotational motion by the at least one tilt adjustment motor imparts corresponding axial movement, relative to the at least one tilt adjustment motor or a datum structure, to the connected portion of the component thereby to adjust the orientation of the component
Implementation Method 2
the bellows at least partially provides a vacuum seal between the component and the processing chamber
Data Source
AI summary
In some examples, an automated tilting system is provided for adjusting an orientation of a component in a substrate processing chamber. The automated tilting system comprises at least one tilt adjustment motor arranged to cooperate with the component and be connected to a portion of the component by a coupling. The coupling is configured such that automated rotational motion by the at least one tilt adjustment motor imparts corresponding axial movement, relative to the at least one tilt adjustment motor or a datum structure, to the connected portion of the component to adjust the orientation of the component in the processing chamber.