MOTT Insulator Phase Transition for Charge Dissipation

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Solution Overview

Problem

Compound semiconductor devices are prone to breakage and deterioration when exposed to high-energy particles due to the formation of electron-hole pairs, which create conduction paths and increase hole concentration, leading to potential and hole current fluctuations, and existing solutions like SiN capacitors fail to dissipate charges effectively.

Innovation Solution

Incorporating a strongly correlated electron system material between the gate and source electrodes, which undergoes a phase transition from insulator to conductor, allowing electron-hole pairs to flow to ground and reducing device damage.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If a SiN capacitor is connected between gate electrode and source electrode to improve high frequency characteristics, then high frequency characteristics are improved, but charges generated by electron-hole pairs cannot be removed and device reliability deteriorates

Engineering Contradiction:
Improvehigh frequency characteristicsVSAvoiddevice reliability
Core Design Contradiction:
SpeedVSReliability

Solution Approach 1:

A novel charge removal structure is introduced as an intermediary component between the gate electrode and source electrode. This structure includes a first electrode connected to the gate electrode, a second electrode connected to the source electrode, and a charge removal layer formed between these electrodes, which provides a dedicated pathway for removing charges without interfering with the capacitor's high frequency function

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The charge removal function is segmented from the capacitor structure by creating separate first and second electrodes with a dedicated charge removal layer between them, allowing independent optimization of both high frequency characteristics and charge removal capability

Inventive Principle:
Principle #1Segmentation

2Quantity of substance

If high energy particles are incident upon the device, then electron-hole pairs are generated increasing hole concentration and potential, but conduction paths form causing device breakage

Engineering Contradiction:
Improveelectron-hole pair concentrationVSAvoiddevice integrity
Core Design Contradiction:
Quantity of substanceVSReliability

Solution Approach 1:

The harmful electron-hole pairs generated by high energy particle incidence are converted into a beneficial effect by providing a controlled conduction path through the charge removal structure. This structure allows the excess charges to be safely removed to ground potential, transforming the harmful charge accumulation into a controlled charge removal mechanism that protects the device

Inventive Principle:
Principle #22Blessing in disguise (Convert harm into benefit)

Solution Approach 2:

The charge removal structure acts as an intermediary pathway between the AlGaN channel layer where electron-hole pairs are generated and the ground, providing a safe route for charge dissipation that prevents the formation of damaging conduction paths through the passivation film

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The compound semiconductor device becomes more resilient to severe environments by effectively dissipating electron-hole pair-generated charges, reducing damage from high-energy particles and maintaining operational integrity.

Implementation Method 1

the strongly correlated electron system material connected to the gate electrode senses potential fluctuation in the device, and conducts phase transition from an insulator to a conductor in a short time

Methodology Applied
Scientific EffectPhase transition: Phase Change

Implementation Method 2

The electron-hole pairs generated in the device pass through the strongly correlated electron system material which has been changed to a conductive material, and flow to the ground

Methodology Applied
Scientific EffectElectrical conduction: Conduction (electrical)

Data Source

PatentUS11283021B2Compound semiconductor device including MOTT insulator for preventing device damage due to high-energy particles
Publication Date: 2022.03.22 MITSUBISHI ELECTRIC CORP
  • US11283021B2 patent drawing
  • US11283021B2 patent drawing
  • US11283021B2 patent drawing

AI summary

A semiconductor layer (2,3) is provided on a substrate (1). A gate electrode (4), a source electrode (5) and a drain electrode (6) are provided on the semiconductor layer (3). A strongly correlated electron system material (12) is connected between the gate electrode (4) and the source electrode (5).