Mounting Stage Support Layout for Fast, Stable Substrate Transport

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Solution Overview

Problem

In batch-type substrate processing apparatuses, transporting a mounting stage with a substrate mounted on it results in significant stress, leading to substrate displacement during acceleration and deceleration, which slows down the processing time.

Innovation Solution

A substrate processing apparatus with a conveyor system that holds the mounting stage at least two places in the vertical direction, using lower and upper holders to stabilize the stage during transport, and a controller to manage the transport process, reducing stress and displacement.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If the mounting stage is transported by using a lower side of the mounting stage as a fulcrum, then the mounting stage can be transported, but a large stress is applied to an upper side of the mounting stage causing substrate displacement

Engineering Contradiction:

Improvetransport speedVSAvoidsubstrate position accuracy

Core Design Contradiction:

SpeedVSManufacturing precision

Solution Approach 1:

The patent divides the single-point support into multiple support points by introducing upper holders in addition to lower holders. This segmentation of the support function distributes the stress during transport, preventing substrate displacement while enabling faster mounting stage transportation.

Inventive Principle:

Principle #1Segmentation

2Manufacturing precision

If acceleration and deceleration are reduced to prevent substrate displacement, then substrate position accuracy is maintained, but transport time increases

Engineering Contradiction:

Improvesubstrate position accuracyVSAvoidtransport time

Core Design Contradiction:

Manufacturing precisionVSLoss of time

Solution Approach 1:

By segmenting the support into upper and lower holders, the system can maintain substrate position accuracy even during faster acceleration and deceleration, thereby reducing transport time without sacrificing precision.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The upper holders are positioned beforehand to prevent substrate displacement during acceleration and deceleration phases, cushioning the substrate against the effects of rapid motion changes and enabling faster transport cycles.

Inventive Principle:

Principle #11Beforehand cushioning (Prior cushioning)

3Device complexity

If a single-point support system is used, then the holding mechanism is simple, but large stress is applied causing substrate displacement

Engineering Contradiction:

Improveholding mechanism complexityVSAvoidsubstrate position accuracy

Core Design Contradiction:

Device complexityVSManufacturing precision

Solution Approach 1:

The holding mechanism is segmented into multiple simple components (upper holders and lower holders) that work together. This segmentation maintains relative structural simplicity while dramatically improving substrate position accuracy by distributing support forces.

Inventive Principle:

Principle #1Segmentation

Data Source

PatentUS11996311B2Substrate processing apparatus, method of processing substrate, method of manufacturing semiconductor device, and recording medium

Publication Date: 2024.05.28 KOKUSAI DENKI KK

AI summary

There is provided a technique that includes: at least one process chamber in which at least one substrate is processed; a mounting stage configured to be capable of mounting the at least one substrate on the mounting stage; a transport chamber including a conveyor configured to be capable of holding the mounting stage at least two places in a vertical direction and transporting the mounting stage; and a controller configured to be capable of performing a transport control of the conveyor in the transport chamber.