Mounting Table Contact Cooling for Faster Substrate Temperature Control

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Solution Overview

Problem

Existing substrate processing apparatuses face challenges in achieving rapid and efficient cooling of substrates due to the time required to control the substrate to a target cooling temperature using indirect cooling methods or partial contact cooling methods.

Innovation Solution

A mounting table structure with a refrigerating mechanism and an elevating drive part that allows direct contact between the refrigerating mechanism and the mounting table via contacts, enabling efficient heat transfer and rapid cooling of substrates.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If indirect cooling method using cooling gas is used, then cooling can be achieved without direct contact, but cooling time becomes excessively long

Engineering Contradiction:

Improvecooling effectivenessVSAvoidcooling time

Core Design Contradiction:

ReliabilityVSLoss of time

Solution Approach 1:

The refrigerating mechanism is designed to dynamically change its position between contact and non-contact states with the mounting table. The elevating drive part enables the refrigerating mechanism to move vertically, allowing it to contact the mounting table for rapid cooling when needed, and separate when not needed, thus dynamically adjusting the cooling intensity and time

Inventive Principle:

Principle #15Dynamics

Solution Approach 2:

The contact members serve as intermediary elements between the refrigerating mechanism and the mounting table. These contacts facilitate efficient thermal transfer when brought into contact, acting as a mediator that enables rapid heat exchange without requiring direct large-area contact, thus reducing cooling time while maintaining effectiveness

Inventive Principle:

Principle #24Intermediary (Mediator)

2Productivity

If direct contact cooling is implemented, then cooling efficiency is significantly enhanced, but structural complexity increases due to elevating mechanism

Engineering Contradiction:

Improvecooling efficiencyVSAvoidstructure complexity

Core Design Contradiction:

ProductivityVSDevice complexity

Solution Approach 1:

The refrigerating mechanism is segmented into multiple independent contact members rather than a single large contact surface. Each contact member can independently contact the mounting table, and the elevating drive part controls their vertical movement. This segmentation simplifies the overall structure while enabling efficient cooling through multiple distributed contact points

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The elevating drive part serves multiple functions: it positions the refrigerating mechanism for cooling operations, controls the contact timing between refrigerating mechanism and mounting table, and enables both contact and non-contact operational modes. This multi-functionality reduces the need for separate mechanisms, thereby simplifying the overall device structure

Inventive Principle:

Principle #6Universality (Multi-functionality)

3Productivity

If cooling mechanism is always in contact with mounting table, then cooling efficiency is maximized, but adaptability for different processing modes is reduced

Engineering Contradiction:

Improvecooling efficiencyVSAvoidprocessing mode flexibility

Core Design Contradiction:

ProductivityVSAdaptability or versatility

Solution Approach 1:

The refrigerating mechanism's position is dynamically adjustable between contact and non-contact states with the mounting table through the elevating drive part. This dynamic positioning capability allows the system to adapt between different processing modes: contact mode for rapid cooling applications and non-contact mode for other processing operations, thus maintaining both cooling efficiency and processing flexibility

Inventive Principle:

Principle #15Dynamics

Solution Approach 2:

The system changes the physical parameter of contact state (contact vs. non-contact) to adapt to different processing requirements. By controlling the vertical position of the refrigerating mechanism, the system can switch between maximum heat transfer (contact) and minimal interference (non-contact), providing versatility for different substrate processing modes while maintaining cooling capability when needed

Inventive Principle:

Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The direct contact cooling method significantly shortens the cooling time of substrates, enhances cooling efficiency, and improves throughput in substrate processing applications.

Implementation Method 1

The refrigerating mechanism and the mounting table are allowed to be brought into contact with each other via the contact by moving the mounting table or the refrigerating mechanism up and down by the elevating drive part

Methodology Applied

Scientific EffectThermal conduction: Conduction (thermal)

Data Source

PatentUS12315707B2Mounting table structure, substrate processing apparatus, and method of controlling substrate processing apparatus

Publication Date: 2025.05.27 TOKYO ELECTRON LTD

AI summary

A mounting table structure includes a mounting table on which a substrate is mounted, a refrigerating mechanism configured to cool the substrate, an elevating drive part configured to move the mounting table or the refrigerating mechanism up and down, and at least one contact provided at a position between the refrigerating mechanism and the mounting table which face each other. The refrigerating mechanism and the mounting table are allowed to be brought into contact with each other via the contact by moving the mounting table or the refrigerating mechanism up and down by the elevating drive part.