Mounting Table Temperature Control via Parallel Coolant Channels
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Solution Overview
Problem
Existing methods for controlling the temperature of a mounting table in plasma processing are inefficient, requiring multiple chiller units, leading to high costs, space inefficiency, and slow temperature changes, which complicates achieving uniform temperature distributions and rapid temperature adjustments necessary for modern plasma processing techniques.
Innovation Solution
A device with a single coolant circulator and channel switching unit allows for precise control of temperature and temperature distribution on a mounting table by circulating coolant through multiple passageways, using a coolant temperature controller and flow rate control valve to rapidly raise or lower temperatures, and switch between different temperature control modes based on processing conditions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If multiple chiller units are used to control temperature distribution, then temperature control precision is improved, but device complexity and cost increase
Solution Approach 1:
The mounting table is divided into multiple regions with independent coolant channels, allowing localized temperature control in each region without requiring separate chiller units. This segmentation enables precise temperature distribution control while maintaining a single chiller unit system.
Solution Approach 2:
The patent implements dynamic temperature control by adjusting coolant flow rates to different regions based on real-time temperature requirements. The system can rapidly switch between different temperature profiles by controlling valve openings, enabling adaptive temperature management without complex hardware.
2Measurement precision
If multiple chiller units are used for independent temperature control, then temperature distribution control is improved, but space occupancy increases
Solution Approach 1:
Multiple temperature control functions are merged into a single chiller unit system. The patent uses one chiller unit with multiple coolant output lines that can be independently controlled, combining the functionality of multiple chiller units into one compact device, thereby reducing space occupancy while maintaining temperature distribution control capability.
3Ease of operation
If long coolant lines are used to connect chiller unit and mounting table, then installation flexibility is improved, but temperature control responsiveness deteriorates
Solution Approach 1:
The coolant delivery system is segmented into multiple shorter channels within the mounting table structure itself, rather than using one long external line. This segmentation reduces the total coolant path length, improving thermal response speed while maintaining installation flexibility through the modular channel design.
Solution Approach 2:
The mounting table acts as an intermediary structure that integrates coolant channels directly within it. This eliminates the need for long external connecting lines by serving as a thermal conduit, thereby improving responsiveness while preserving installation flexibility through the built-in channel architecture.
4Productivity
If rapid temperature changes are implemented for multilayer film processing, then productivity is improved, but temperature control stability deteriorates
Solution Approach 1:
The system implements dynamic temperature control by rapidly adjusting coolant flow rates to different regions of the mounting table. This allows the system to achieve quick temperature changes for different processing stages while maintaining stability within each stage through precise flow rate regulation, thus balancing productivity and temperature stability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables high-accuracy, rapid temperature control and distribution on a mounting table, improving processing uniformity and diversity, and reducing costs by eliminating the need for multiple chiller units and simplifying the system.
Implementation Method 1
a coolant circulator... for circulating a coolant in the first and the second coolant passageway
Implementation Method 2
a coolant temperature controller... for raising or lowering the temperature of the coolant from the reference temperature to a desired set temperature
Implementation Method 3
The mounting table serving as the heat plate is required to properly compensate a heat distribution
Data Source
AI summary
A method for controlling a temperature of a mounting table includes a first and a second temperature control mode in which a first and a second coolant passageway of a coolant circulator are connected in parallel between an output port and a return port of the coolant circulator. The first temperature control mode includes: making a part of a coolant of a reference temperature flow in the first coolant passageway after raising or lowering the temperature thereof to a desired set temperature; and making a residual coolant flow in the second coolant passageway while substantially maintaining the reference temperature thereof. The second temperature control mode includes: making a part of the coolant flow in the first coolant passageway while substantially maintaining the reference temperature thereof; and making a residual coolant flow in the second coolant passageway while substantially maintaining the reference temperature thereof.