Mounting Table Sensor Calibration for Vacuum-Suction Inspection
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Solution Overview
Problem
Existing wafer inspection devices face challenges in calibrating temperature sensors in a vacuum-suction state due to heat escape to the atmosphere, leading to temperature distribution discrepancies, and manual calibration methods are complex and inefficient.
Innovation Solution
A mounting table with integrated temperature sensors and electrode pads allows for easy calibration of the control temperature sensor in a vacuum-suction state by measuring temperature at multiple spots and using a digital temperature sensor with I2C or SMBus interfaces, connected via electrode pads to a probe card for data transmission.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If manual calibration methods are used for temperature sensors in vacuum-suction state, then calibration can be performed, but the process becomes complex and inefficient
Solution Approach 1:
The mounting table performs self-calibration of its temperature sensors using the substrate's temperature measurement capabilities. The substrate acts as a reference object with known thermal properties, allowing the mounting table's temperature sensors to calibrate themselves automatically without external intervention or complex manual procedures.
Solution Approach 2:
The calibration process is performed automatically as a preliminary step before actual inspection operations. By pre-calibrating the temperature sensors using the substrate's thermal characteristics, the system ensures measurement accuracy is established in advance, eliminating the need for complex manual calibration during maintenance periods.
2Measurement precision
If the system is exposed to atmosphere for calibration, then temperature sensor calibration can be performed, but heat escape to atmosphere causes temperature distribution discrepancies
Solution Approach 1:
The calibration process utilizes the vacuum-suction environment already present during normal inspection operations. By performing calibration in this controlled environment rather than exposing the system to atmosphere, the harmful heat escape effect is eliminated while maintaining measurement accuracy.
Solution Approach 2:
The substrate serves as both the calibration reference object and the medium that maintains the vacuum-suction environment during calibration. Its presence enables automatic calibration while preserving the controlled thermal environment, preventing heat escape discrepancies.
3Measurement precision
If manual calibration procedures are implemented, then temperature sensors can be calibrated, but system downtime increases
Solution Approach 1:
The mounting table automatically calibrates its own temperature sensors using the substrate's thermal properties without requiring external calibration equipment or manual intervention. This self-calibration capability eliminates the need to schedule separate calibration maintenance periods.
Solution Approach 2:
The calibration process is seamlessly integrated into the normal inspection workflow. The substrate remains in place during both calibration and inspection operations, allowing continuous operation without interruption. Temperature sensors are calibrated automatically between inspection cycles or during substrate loading/unloading.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise temperature calibration of the mounting table in a vacuum-suction state, reducing downtime and allowing simultaneous inspection and maintenance without exposing the system to the atmosphere.
Implementation Method 1
capable of easily calibrating a control temperature sensor of the mounting table in a vacuum-suction state
Data Source
AI summary
There is provided a mounting table on which a substrate to be inspected is mounted. The mounting table comprises: a plurality of temperature sensors, each configured to measure a temperature of a corresponding one of a plurality of spots on the mounting table; and electrode pads, each connected to a corresponding one of the temperature sensors and installed on a mounting surface.