Mounting Table Temperature Control Device for Localized Substrate Processing

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Solution Overview

Problem

Conventional substrate processing apparatuses face challenges in locally controlling the temperature of specific portions of the mounting table, particularly when the power level of high-frequency power for plasma generation is low, as they struggle to generate sufficient temperature differences between central and peripheral portions.

Innovation Solution

A substrate processing apparatus with a mounting table temperature control device that includes a main flow path and auxiliary flow paths, where a temperature control medium is circulated through the main flow path and branched to the auxiliary flow paths to adjust the temperature of specific portions of the mounting table, allowing for localized temperature control independent of the entire surface temperature.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If a coolant path is formed within the mounting table to control temperature, then temperature control capability is improved, but local temperature adjustment capability deteriorates

Engineering Contradiction:

Improvetemperature control capabilityVSAvoidlocal temperature adjustment capability

Core Design Contradiction:

TemperatureVSAdaptability or versatility

Solution Approach 1:

The mounting table is divided into multiple independent temperature control zones with separate coolant paths. Each zone can be controlled independently by regulating the flow rate or temperature of coolant supplied to that specific zone, enabling local temperature adjustment while maintaining overall temperature control capability

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Different portions of the mounting table are assigned different thermal characteristics through localized coolant path configurations. By adjusting coolant flow parameters in specific regions, each zone can have customized temperature settings tailored to the specific processing requirements of substrates in that area

Inventive Principle:

Principle #3Local quality

2Temperature

If high-frequency power is increased to generate temperature differences between central and peripheral portions, then temperature difference generation capability is improved, but energy consumption increases

Engineering Contradiction:

Improvetemperature difference generation capabilityVSAvoidenergy consumption

Core Design Contradiction:

TemperatureVSUse of energy by moving object

Solution Approach 1:

The patent replaces the electromagnetic heating method (high-frequency power) with a thermal control method using coolant circulation. By controlling coolant flow rate and temperature in different zones of the mounting table, the desired temperature differences are achieved through fluid-based thermal management rather than electromagnetic heating, significantly reducing energy consumption

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The system achieves temperature differentiation by changing coolant flow parameters (flow rate, temperature) in different zones rather than changing electromagnetic power levels. This allows precise control of temperature differences between central and peripheral portions through hydraulic parameter adjustment instead of energy-intensive electromagnetic heating

Inventive Principle:

Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables precise local temperature adjustment of the mounting table, even at low plasma generation power levels, by controlling the temperature of the temperature control medium, thereby improving temperature control controllability and responsiveness.

Implementation Method 1

a temperature control medium circulating unit configured to supply and circulate a temperature control medium adjusted to have a set temperature into and through the main flow path, allow the temperature control medium to be branched, and supply and circulate the branched temperature control medium into and through the at least one auxiliary flow path after adjusting a temperature of the branched temperature control medium

Methodology Applied

Scientific EffectHeat transfer: Conduction (thermal)

Data Source

PatentUS10418258B2Mounting table temperature control device and substrate processing apparatus

Publication Date: 2019.09.17 TOKYO ELECTRON LTD

AI summary

A temperature of only a part in a surface of a mounting table can be set to be higher than or lower than a set temperature of an entire surface of the mounting table. A main flow path 320 formed within the mounting table 200 to be arranged over the entire surface thereof; an auxiliary flow path 330 formed within the mounting table to be arranged in a part of the surface thereof; and a temperature control medium circulating unit that supplies and circulates a temperature control medium adjusted to have a set temperature into and through the main flow path, allows the temperature control medium to be branched, and supplies and circulates the branched temperature control medium into and through the auxiliary flow path after adjusting a temperature of the branched temperature control medium to be a temperature higher than or lower than the set temperature are provided.