Mounting Table Coolant Switching for Rapid Temperature Zoning
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Solution Overview
Problem
Existing methods for controlling the temperature of a mounting table in plasma processing are inefficient, requiring multiple chiller units, leading to high costs, space inefficiency, and poor responsiveness, especially when rapid temperature changes are needed for processing multilayer films in a single chamber.
Innovation Solution
A device with a single coolant circulator and channel switching unit allows for precise control of temperature distribution by circulating coolant through concentric passageways on the mounting table, using an inline heater and flow rate control valve to rapidly raise or lower temperatures, enabling high-speed temperature adjustments.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If multiple chiller units are used to control temperature distribution, then temperature control precision is improved, but device complexity and cost increase
Solution Approach 1:
The mounting table is divided into multiple temperature control zones with independent coolant passageways. Each zone can have its temperature independently adjusted by controlling coolant flow rate and temperature, allowing precise temperature distribution across different regions without requiring multiple separate chiller units.
Solution Approach 2:
A single chiller unit performs multiple functions by supplying coolant to multiple independently controlled passageways. The system achieves the functionality of multiple chillers through one multi-functional unit combined with flow rate control valves and temperature controllers for each zone.
2Manufacturing precision
If multiple chiller units are used for independent temperature control, then temperature distribution control is improved, but space requirements and cost increase
Solution Approach 1:
Multiple temperature control functions that would traditionally require separate chiller units are merged into a single integrated system. One chiller unit with multiple output lines and flow rate control valves replaces what would otherwise be multiple separate chillers, reducing space occupation and system cost while maintaining independent temperature control capability.
3Adaptability or versatility
If long coolant lines are used to connect chiller unit and mounting table, then system flexibility is improved, but temperature control speed decreases
Solution Approach 1:
Coolant temperature and flow rate are pre-adjusted in each zone's passageway before reaching the mounting table through flow rate control valves and local temperature controllers. This preliminary adjustment ensures rapid temperature response when processing conditions change, overcoming the delay caused by long coolant lines.
4Speed
If coolant flow rate is increased for rapid temperature change, then temperature control speed is improved, but energy loss increases
Solution Approach 1:
Each temperature control zone has its own flow rate control valve that adjusts coolant flow locally based on specific processing requirements. This localized control allows each zone to use only the necessary flow rate for its temperature adjustment needs, avoiding the energy waste that would occur if the entire system used high flow rates for all zones.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables accurate and rapid temperature control of the mounting table, improving processing uniformity and diversity by allowing for various temperature profiles and quick changes, thus enhancing production yield and reproducibility in plasma processing.
Implementation Method 1
The mounting table serving as the heat plate is required to properly compensate a heat distribution caused by a substrate supporting structure or a heat input characteristic distribution on the substrate caused by nonuniformity of a radiant heat from a plasma and a chamber wall
Implementation Method 2
a coolant temperature controller for raising or lowering a temperature of the coolant from the reference temperature to a desired set temperature
Implementation Method 3
a channel switching unit for switching connection relationships between the coolant circulator and the first and the second coolant passageways
Data Source
AI summary
A device for controlling a temperature of a mounting table for mounting thereon a target object includes a first and a second coolant passageway provided at the mounting table, a coolant circulator for circulating a coolant in the first and the second coolant passageway, channels, a coolant temperature controller for raising or lowering the temperature of the coolant, a channel switching unit for connecting, blocking and changing the channels among a first to a fourth port; and a channel controller. Various modes for controlling a temperature of the mounting table can be obtained by combining an ON/OFF state of the heating operation in the coolant temperature controller with ON/OFF states of opening/closing valves in the channel switching unit under the control of the channel controller.