Movable Annular Liquid Receiver for Variable Developer Supply Lengths
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Solution Overview
Problem
Existing development processing apparatuses cannot share a liquid receiver for both relatively long and short developer supplies due to interference issues with multi-stage annular walls, limiting the flexibility and efficiency in developer distribution and recovery.
Innovation Solution
A development processing apparatus with a substrate holder and independent, movable annular walls in the liquid receiver that can adjust vertically to accommodate both long and short developer supplies, allowing shared use of the liquid receiver and optimizing airflow and developer recovery.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a multi-stage annular wall structure is used in the liquid receiver, then the liquid receiver can accommodate different developer supply lengths, but the structure becomes complex and interference issues arise between stages
Solution Approach 1:
The patent applies the dynamics principle by making the annular walls movable rather than fixed. The first and second annular walls can move independently up and down, allowing the liquid receiver to adapt to different developer supply lengths dynamically. This resolves the contradiction by providing versatility without permanent structural complexity, as the walls only become complex when actually needed for different configurations.
Solution Approach 2:
The patent segments the annular wall structure into multiple independently movable stages (first and second annular walls). Each stage can be positioned independently to accommodate different developer supply lengths. This segmentation allows the system to achieve adaptability while keeping each individual wall segment relatively simple in structure, avoiding the need for a single complex multi-stage fixed structure.
2Adaptability or versatility
If the annular walls are made movable and independently adjustable, then the liquid receiver can share between long and short developer supplies, but the control complexity increases
Solution Approach 1:
The patent applies universality by designing the liquid receiver with annular walls that can serve multiple functions: accommodating both long and short developer supplies, controlling airflow patterns, and enabling shared use of the liquid receiver across different developer supply configurations. This multi-functionality reduces the need for separate control mechanisms for each function, thereby limiting the increase in control complexity while achieving high adaptability.
3Device complexity
If a single fixed annular wall structure is used, then the liquid receiver structure is simple, but it cannot accommodate both long and short developer supplies effectively
Solution Approach 1:
The patent transforms the fixed annular wall into a dynamic, movable structure that can adjust its position independently. This allows the liquid receiver to maintain structural simplicity in its base design while achieving adaptability through the movable walls that can be positioned as needed for different developer supply configurations.
Solution Approach 2:
The patent adds the vertical dimension of movement to the annular walls, allowing them to move up and down independently. This dimensional change enables the liquid receiver to accommodate different developer supply lengths without increasing horizontal structural complexity, as the adaptability is achieved through vertical positioning rather than horizontal expansion.
Data Source
AI summary
A development processing apparatus includes: a substrate holder that holds a substrate horizontally wherein the substrate includes a resist film; a rotator that rotates the substrate holder; first and second developer supplies that supply a developer to the substrate; and a liquid receiver that receives the developer from the substrate. The first developer supply is formed to have a length smaller than a diameter of the substrate. The second developer supply is formed to have a length equal to or larger than the diameter of the substrate. The liquid receiver includes first and second annular walls that are formed in an annular shape having a circular opening having a diameter larger than the diameter of the substrate. The first and second annular walls are movable up and down independently of each other, and a vertical distance between the first annular wall and the second annular wall is variable.