Movable Aperture Members for Charged Particle Beam Devices

Resolve Bottlenecks,
Find Innovative SolutionsGenerate Solutions

Solution Overview

Problem

Charged particle beam devices face limitations in adjusting aperture size and shape due to limited aperture options, leading to suboptimal beam current and spatial resolution, and aperture deformation under high beam exposure, which affects beam spot size and current stability.

Innovation Solution

The introduction of an aperture system with at least two independently movable members allows for gradual adjustment of aperture angle and position without interrupting beam operation, enabling optimization of beam current and spatial resolution, and allows for section replacement to prevent deformation, thus extending device lifetime.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If a limited number of fixed apertures are used, then the device structure is simple, but the flexibility in adjusting aperture angle and beam current is limited

Engineering Contradiction:

Improveflexibility in adjusting aperture angleVSAvoidaperture system structure

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent replaces fixed apertures with movable aperture members that can be dynamically positioned to define different aperture angles. The aperture members are mounted on movable stages allowing continuous adjustment of their positions, enabling flexible control of the charged particle beam aperture angle without requiring multiple discrete aperture components.

Inventive Principle:

Principle #15Dynamics

2Adaptability or versatility

If multiple fixed apertures are provided, then more aperture options are available, but the space requirements and electric field configuration constraints increase

Engineering Contradiction:

Improvenumber of aperture optionsVSAvoidaperture system space

Core Design Contradiction:

Adaptability or versatilityVSArea of stationary object

Solution Approach 1:

Instead of providing multiple fixed apertures that occupy space, the patent uses a dynamic system where aperture members can be moved to different positions to create various aperture configurations. This eliminates the need for multiple discrete aperture components and reduces the space required for the aperture system.

Inventive Principle:

Principle #15Dynamics

3Adaptability or versatility

If apertures are shifted to change diameter, then different beam currents can be achieved, but beam operation is interrupted and alignment procedures are required

Engineering Contradiction:

Improveadjustment of beam currentVSAvoidbeam operation continuity

Core Design Contradiction:

Adaptability or versatilityVSProductivity

Solution Approach 1:

The patent enables continuous adjustment of aperture members during beam operation without interrupting the beam. The movable stages allow aperture members to be repositioned while the beam continues to pass through the aperture, maintaining beam operation continuity and eliminating the need for alignment procedures that would interrupt the beam.

Inventive Principle:

Principle #20Continuity of useful action

4Device complexity

If permanent exposure to charged particle beam is used, then the aperture system is simple, but the aperture edges deform and contaminate over time

Engineering Contradiction:

Improveaperture system designVSAvoidaperture angle stability

Core Design Contradiction:

Device complexityVSReliability

Solution Approach 1:

The patent uses movable aperture members that can be repositioned to expose different sections of the aperture edges to the beam. This allows worn or contaminated sections to be moved away from the beam path and replaced by fresh sections, preventing cumulative deformation and contamination that would occur with permanent exposure of fixed aperture edges.

Inventive Principle:

Principle #15Dynamics

5Manufacturing precision

If aperture members are moved to adjust size, then optimal beam parameters can be achieved, but the precision of adjustment is limited by discrete positions

Engineering Contradiction:

Improvebeam spot size optimizationVSAvoidadjustment mechanism

Core Design Contradiction:

Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent employs movable stages with precise positioning capabilities that allow aperture members to be adjusted to continuous positions rather than discrete fixed locations. This enables fine-tuning of the aperture angle and beam spot size optimization with high precision, while the stage mechanisms provide controlled movement for accurate positioning.

Inventive Principle:

Principle #15Dynamics

Data Source

PatentUS7763866B2Charged particle beam device with aperture

Publication Date: 2010.07.27 ICT INTEGRATED CIRCUIT TESTING GESELLSCHAFT FUER HALBLEITERPRUEFTECHNIK GMBH

AI summary

The present invention relates to a charged particle beam device (1) for inspecting or structuring a specimen (3) comprising a charged particle beam source (5) to generate a charged particle beam (7), a focussing lens (9) to focus the charged particle beam (7) onto the specimen (3), and an aperture system (13) for defining an aperture (6) for the charged particle beam (7). The aperture system (13) includes a first member (20) to block a first portion (7a) of the charged particle beam (7) between the charged particle beam source (5) and the focussing lens (9), a second member (30) to block a second portion (7b) of the charged particle beam (7) between the charged particle beam source (5) and the focussing lens (9), first means (24) for moving the first member (20) to adjust the size of the blocked first portion (7a) of the charged particle beam (7), and second means (34) for moving the second member (30) independently from the first portion (7b). With such aperture system (13), it is possible to freely adjust the size of the aperture (6) and align it to the optical axis (8) during operation.