Movable Light Selection Aperture for Multi-Angle Optical Inspection

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Solution Overview

Problem

Existing contactless inspection methods struggle to acquire multiple images of an object's surface or interior with varying light beam directions, limiting the detection of minute surface asperities and scattering angle distribution.

Innovation Solution

An optical inspection apparatus with a movable first light selection aperture having two distinct regions that can switch between different light selection paths, allowing the acquisition of multiple images by altering the light beam direction and intensity information, facilitated by a controller and aperture movement mechanism.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If a conventional inspection method using a diffraction grating or wavelength filter is used to specify color and identify light beam direction, then the light beam direction can be identified, but multiple images with varying light beam directions cannot be acquired

Engineering Contradiction:
Improvecapability to acquire multiple images with varying light beam directionsVSAvoidinspection system complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The light selection aperture is made movable rather than fixed, allowing it to selectively pass light beams from different directions. The aperture can be positioned at multiple locations along the optical axis and rotated about the optical axis, enabling dynamic selection of light beam directions for imaging. This dynamic positioning mechanism resolves the contradiction by providing multiple imaging capabilities without requiring multiple fixed inspection systems.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The patent introduces rotational movement of the light selection aperture about the optical axis as an additional degree of freedom. By rotating the aperture, light beams from different angular directions can be selected and directed to the image sensor. This rotational dimension enables acquisition of multiple images with varying light beam directions, resolving the limitation of conventional fixed aperture systems.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Measurement precision

If the light selection aperture is fixed, then the device structure is simple, but the detection of minute surface asperities and scattering angle distribution is limited

Engineering Contradiction:
Improvedetection precision of surface asperities and scattering angle distributionVSAvoidaperture movement mechanism complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The light selection aperture is equipped with movement mechanisms that allow it to be dynamically positioned at different locations along the optical axis and rotated about the optical axis. This dynamic positioning enables selective imaging of light beams from different directions, which is essential for detecting minute surface asperities and measuring scattering angle distribution with high precision.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The patent changes the positional parameters of the light selection aperture, including its distance from the object and its rotational angle about the optical axis. By varying these parameters, the system can capture images under different lighting conditions and angles, thereby improving the precision of surface asperity detection and scattering angle measurement.

Inventive Principle:
Principle #35Parameter changes

3Loss of information

If multiple inspection systems are used to acquire images from different light beam directions, then comprehensive surface information can be obtained, but the device complexity and cost increase

Engineering Contradiction:
Improvecompleteness of surface informationVSAvoidnumber of inspection systems
Core Design Contradiction:
Loss of informationVSDevice complexity

Solution Approach 1:

A single light selection aperture is designed to perform multiple functions by being positioned at different locations and rotated to different angles. This universal aperture can select light beams from various directions and direct them to the image sensor, enabling one inspection system to acquire comprehensive surface information that would otherwise require multiple separate systems.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent merges the functions of multiple inspection systems into a single integrated system. By combining the light selection aperture with movable and rotational capabilities, the system consolidates multiple imaging functions into one device, thereby reducing overall complexity and cost while maintaining the ability to acquire comprehensive surface information from different light beam directions.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables the capture of multiple images with varying light beam directions, enhancing the detection of minute surface asperities and scattering angle distribution, thereby improving the accuracy of optical inspections.

Implementation Method 1

an image-forming optical element 22 having an imaging optical axis C, an image sensor 24 having a light-receiving surface 24a intersecting with the imaging optical axis C of the image-forming optical element 22

Methodology Applied
Scientific EffectOptical focusing: Focusing

Implementation Method 2

a first light selection aperture 26 that includes a first light selection region 32 and a second light selection region 34... the first light selection region 32 and the second light selection region 34 to selectively pass light in different directions

Methodology Applied
Scientific EffectOptical absorption and transmission: Absorption (EM radiation)

Data Source

PatentUS20260079106A1Optical inspection apparatus and optical inspection system
Publication Date: 2026.03.19 KK TOSHIBA
  • US20260079106A1 patent drawing
  • US20260079106A1 patent drawing
  • US20260079106A1 patent drawing

AI summary

According to an embodiment, an optical inspection apparatus includes: an image-forming optical element with an imaging optical axis; an image sensor having a light-receiving surface; and a movable first light selection aperture that is arranged on or near a focal plane of the image-forming optical element. The first light selection aperture includes a first light selection region and a second light selection region that selectively pass light in different directions from an object. When the first light selection region moves to a position, the image sensor acquires a first image of the object incident on the light-receiving surface through the image-forming optical element and the first light selection region. When the second light selection region moves to a position, the image sensor acquires a second image of the object incident on the light-receiving surface through the image-forming optical element and the second light selection region.