Movable Body Apparatus Weight Dispersion Guide

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Solution Overview

Problem

As substrate sizes increase, existing exposure apparatuses face challenges in supporting the weight of larger table members, leading to larger and heavier guide members that complicate position control and posture management.

Innovation Solution

A movable body apparatus with a guide device and weight supporting devices that disperse the load, allowing the guide members to be thinner and lighter, and enabling easier position and posture control by supporting the movable body at multiple points.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If one weight supporting device supports the total weight of the movable body, then the support structure is simple, but the guide member becomes larger and heavier

Engineering Contradiction:

Improvesupport structure complexityVSAvoidguide member weight

Core Design Contradiction:

Device complexityVSWeight of stationary object

Solution Approach 1:

The weight supporting function is segmented into multiple weight supporting devices (first, second, third, and fourth weight supporting devices) distributed at different locations on the movable body. Each device supports a portion of the total weight, thereby dispersing the load on guide members and enabling them to be thinner and lighter while maintaining structural integrity.

Inventive Principle:

Principle #1Segmentation

2Device complexity

If one weight supporting device supports the total weight of the movable body, then the support structure is simple, but the guide member becomes larger and heavier

Engineering Contradiction:

Improvesupport structure complexityVSAvoidguide member length

Core Design Contradiction:

Device complexityVSLength of stationary object

Solution Approach 1:

Inventive Principle:

Principle #1Segmentation

3Device complexity

If the movable body is supported at a single point, then the support structure is simple, but position control and posture control become difficult

Engineering Contradiction:

Improvesupport structure complexityVSAvoidposition control ease

Core Design Contradiction:

Device complexityVSEase of operation

Solution Approach 1:

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The weight supporting devices are arranged in a two-dimensional distribution pattern on the movable body rather than at a single point. This spatial distribution provides multiple contact points that enable independent control of position and posture, adding dimensional control capability to the system.

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

4Device complexity

If the movable body is supported at a single point, then the support structure is simple, but the movable body becomes heavier and thicker

Engineering Contradiction:

Improvesupport structure complexityVSAvoidmovable body weight

Core Design Contradiction:

Device complexityVSWeight of moving object

Solution Approach 1:

Inventive Principle:

Principle #1Segmentation

Data Source

PatentUS10534277B2Movable body apparatus, exposure apparatus, manufacturing method of flat panel display, and device manufacturing method

Publication Date: 2020.01.14 NIKON CORP

AI summary

A substrate stage apparatus includes: a fine movement stage movable along the XY plane; an XY two-dimensional stage apparatus (an X beam and an X carriage) which guides the fine movement stage in a direction parallel to the XY plane; a plurality of weight-canceling devices movable in the direction parallel to the XY plane synchronously with the fine movement stage and also working together to support the weight of the fine movement stage; a first Y step guide provided at the +Y side of the X beam in a direction parallel to the Y-axis, that guides a part of the plurality of weight-canceling devices moving in a direction parallel to the X-axis; and a second Y step guide provided at the other side of the X beam in the direction parallel to the Y-axis, that guides the other part of the plurality of weight-canceling devices moving parallel to the X-axis.