Movable Buffer for Semiconductor FOUP Handling
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Solution Overview
Problem
Conventional automated material handling systems in semiconductor production, specifically the overhead buffers, are insufficient in meeting the demand for front opening unified pods, as they lack the capacity to handle the increasing number of wafers due to their single-layered design.
Innovation Solution
A movable buffer system is introduced, comprising an inclined track, a storage tray, and a transmission mechanism driven by push rod mechanisms, which allows the storage tray to slide from a lower end to a higher end, effectively doubling the stocker capacity by adding a second layer under conventional overhead buffers.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If conventional single-layered overhead buffers are used, then the system structure is simple, but the storage capacity is insufficient to meet the demand for front opening unified pods
Solution Approach 1:
The patent transitions from a single-layer storage structure to a multi-layer structure by adding vertical dimension. The movable buffer assembly includes multiple storage trays arranged at different heights, with the first storage tray positioned higher than the second storage tray, effectively doubling the storage capacity within the same horizontal footprint.
Solution Approach 2:
The patent introduces a movable buffer assembly that can dynamically adjust its position along the transport rail. The movable buffer assembly is configured to move horizontally to receive and release front opening unified pods, providing dynamic adaptability while maintaining increased storage capacity.
2Quantity of substance
If more front opening unified pods are stored, then the storage capacity increases, but the space utilization of conventional overhead buffers is insufficient
Solution Approach 1:
The patent utilizes vertical space by arranging storage trays in multiple layers. The first storage tray is positioned at a higher vertical position than the second storage tray, allowing the system to store more pods without increasing the horizontal area occupied by the overhead buffer.
Solution Approach 2:
The movable buffer assembly is integrated within the overhead buffer structure, with multiple storage trays nested vertically within the same horizontal envelope. This nested arrangement maximizes the use of available overhead space by stacking storage capacity in the vertical dimension.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution increases the storage capacity of the automated material handling system, meeting the demand for more front opening unified pods by utilizing overhead space more efficiently and accommodating twice the number of stockers, ensuring compatibility with conventional systems.
Implementation Method 1
a transmission mechanism, wherein the upper surface of the transmission mechanism is connected to the lower surface of the overhead buffer, the lower surface of the transmission mechanism is connected to the inclined track, and the transmission mechanism is used for driving the storage tray to slide from the first end of the inclined track to the second end of the inclined track under the action of an external force
Data Source
AI summary
The present application relates to a movable buffer, an automated material handling system and a corresponding overhead hoist transfer. The movable buffer includes: an inclined track including a first end and a second end opposite to each other, wherein the second end of the inclined track is higher than the first end of the inclined track; a storage tray connected to the inclined track, wherein the storage tray is provided with a space for accommodating a front opening unified pod, the storage tray is provided with at least one opening; and a transmission mechanism, wherein the upper surface of the transmission mechanism is connected to the lower surface of the overhead buffer, the lower surface of the transmission mechanism is connected to the inclined track, and the transmission mechanism is used for driving the storage tray to slide from the first end of the inclined track to the second end.