Vertically Movable Conveying Rollers for Uniform Substrate Development
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Solution Overview
Problem
The existing substrate treating apparatuses for display manufacturing face challenges in achieving uniform developing processes due to non-uniform developer distribution and contact issues between the substrate and conveying rollers, leading to uneven photoresist pattern development and increased critical dimensions.
Innovation Solution
A substrate treating apparatus with vertically movable conveying rollers that adjust their position to avoid direct contact with the substrate's ends, using sensors to calculate the substrate's position and control the rollers' movement to form and maintain a developer layer uniformly, minimizing developer outflow and ensuring consistent pattern development.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the substrate is transferred horizontally on conveying rollers, then the substrate can be moved through the developing process, but the front and rear ends of the substrate contact the rollers causing non-uniform developer distribution
Solution Approach 1:
The conveying rollers are designed to be vertically movable rather than fixed. The control unit activates the vertical moving part to adjust the position of conveying rollers dynamically based on substrate position detected by the sensor part, allowing the system to adapt between transfer mode and development mode
Solution Approach 2:
The solution moves the conveying rollers from a fixed horizontal plane to a vertically adjustable position. By changing the vertical dimension of roller positioning, the system can elevate rollers above the substrate during development to prevent contact and ensure uniform developer distribution
2Productivity
If the conveying rollers remain in contact with the substrate, then the substrate can be transferred efficiently, but developer flows out through the contact points creating defects
Solution Approach 1:
The system dynamically adjusts roller-substrate contact status based on process requirements. During transfer, rollers contact the substrate for efficient movement; during development, rollers are elevated to prevent developer outflow and pattern defects
Solution Approach 2:
The sensor part detects substrate position and provides feedback to the control unit, which then activates the vertical moving part to adjust roller positions accordingly, creating a closed-loop control system that prevents developer contamination
3Manufacturing precision
If the conveying rollers are positioned to avoid substrate contact, then uniform developer distribution is achieved, but substrate transfer capability is reduced
Solution Approach 1:
The conveying rollers transition between two states: elevated position during development for uniformity, and lowered position during transfer for efficiency. The vertical moving part enables this dynamic state change based on process requirements
Solution Approach 2:
The system periodically switches between transfer mode (rollers contact substrate) and development mode (rollers elevated), creating a cyclic operation that alternates between maximizing transfer efficiency and ensuring development uniformity
Data Source
AI summary
A substrate treating apparatus includes a plurality of conveying rollers arranged in a first direction which is a horizontal direction, and configured to transfer a substrate in the first direction, the substrate being disposed on a plane formed by the first direction and a second direction perpendicular to the first direction, a developer providing nozzle configured to provide a developer onto the substrate to form a developer layer on the substrate, a sensor part for recognizing a position of the substrate, and a vertical moving part configured to move each of the conveying rollers along a third direction which is downward and perpendicular to the first and second directions.