Movable-Core Probe Card for Multi-Pad Semiconductor Testing

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Solution Overview

Problem

Existing probe cards require replacement to accommodate different pad spacings and configurations of semiconductor chips, necessitating facility downtime for testing different products.

Innovation Solution

A probe card design featuring a main circuit board with a fixed core and a movable core, controlled by a driver, allowing for vertical movement to adjust contact with the product based on its type, enabling testing without card replacement.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If a single probe card design is used, then device simplicity is maintained, but adaptability to different pad spacings and configurations is lost

Engineering Contradiction:
Improveadaptability to different pad spacingsVSAvoidprobe card structure
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The probe card incorporates a movable core that can shift position dynamically to accommodate different pad spacings and configurations. This dynamic adjustment capability allows the same probe card to adapt to various semiconductor devices without requiring multiple specialized cards, thereby improving versatility while maintaining reasonable structural complexity through controlled mobility rather than complete redesign.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The probe card is designed with universal adaptability through its movable core mechanism, enabling a single card to perform multiple testing functions across different device types and pad configurations. This multi-functionality eliminates the need for multiple specialized probe cards, improving versatility while the shared structural platform keeps overall device complexity manageable.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Productivity

If probe card replacement is performed for different products, then testing accuracy is maintained, but productivity is reduced due to downtime

Engineering Contradiction:
Improvetesting throughputVSAvoidtesting accuracy
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

The movable core can be dynamically repositioned to match different pad spacings and configurations for various semiconductor devices. This dynamic adaptability allows the same probe card to maintain testing accuracy across different product types without requiring physical replacement, thereby eliminating facility downtime and improving productivity while preserving reliability.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The probe card changes its effective testing parameters by moving the core to different positions, allowing it to accommodate different pad spacings and configurations. This parameter adjustment capability enables the card to maintain testing accuracy for different products without replacement, improving productivity while preserving reliability through controlled parameter variation rather than physical substitution.

Inventive Principle:
Principle #35Parameter changes

3Adaptability or versatility

If multiple probe cards are manufactured for different products, then adaptability is achieved, but loss of time for replacement operations increases

Engineering Contradiction:
Improveproduct coverageVSAvoidreplacement downtime
Core Design Contradiction:
Adaptability or versatilityVSLoss of time

Solution Approach 1:

A single probe card with a movable core is designed to perform the function of multiple specialized probe cards. The movable core can be repositioned to accommodate different pad spacings and configurations, enabling one card to test various semiconductor devices that would otherwise require different dedicated cards. This universality achieves full product coverage while eliminating the time-consuming replacement operations entirely.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The movable core provides dynamic reconfigurability, allowing the probe card to adapt to different product types on-demand. This dynamic capability replaces the static approach of using multiple fixed-purpose cards, achieving the same adaptability and product coverage while completely eliminating replacement downtime by keeping a single versatile card in continuous use.

Inventive Principle:
Principle #15Dynamics

Data Source

PatentUS12560628B2Probe card
Publication Date: 2026.02.24 SAMSUNG ELECTRONICS CO LTD
  • US12560628B2 patent drawing
  • US12560628B2 patent drawing
  • US12560628B2 patent drawing

AI summary

A probe card is provided. The probe card includes: a main circuit board defining an opening; a fixed core provided on a bottom surface of the main circuit board; a movable core provided adjacent the fixed core and configured to move through the opening along a vertical direction; and a driver provided on an upper surface of the main circuit board and configured to control the movable core to move along the vertical direction. The driver includes a driving source provided on an installation portion of the main circuit board, and a power transmission member connected to the driving source and including a roller configured to contact the movable core, and the driver is configured to move the movable core to control whether the fixed core or the movable core is electrically connected to a product, according to a type of the product.