Movable Cup Developing Apparatus for Positive and Negative Resist Separation
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Solution Overview
Problem
Existing developing treatment apparatuses require separate modules for positive and negative developing solutions, leading to increased size and complexity due to the inability to perform both treatments without mixing the solutions.
Innovation Solution
A developing treatment apparatus with a rotary drive mechanism, dual nozzles for solution supply, and a movable cup system that directs developing solutions into separate flow paths within a single module, preventing mixing and allowing for efficient drainage of both positive and negative solutions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If separate modules are used for positive and negative developing solutions, then mixing of solutions is prevented, but the number of modules and apparatus size increase
Solution Approach 1:
The single module is segmented into separate flow paths (first flow path for positive developing solution, second flow path for negative developing solution) that are spatially separated and independently controlled, preventing mixing while maintaining a compact structure
Solution Approach 2:
The single module is designed to perform multiple functions: it can process both positive and negative developing solutions through different flow paths, and the drainage system can handle both types of solutions separately through the same module structure
2Reliability
If separate modules are used for positive and negative developing solutions, then solution treatment is ensured, but the apparatus size increases
Solution Approach 1:
The drainage system is segmented into separate drainage paths (first drainage path for positive solution, second drainage path for negative solution) within the single module, ensuring appropriate treatment of each solution type without increasing overall apparatus volume
Solution Approach 2:
Multiple flow paths and drainage systems are nested within a single module structure, with the first and second flow paths and their corresponding drainage paths organized in a compact, space-efficient arrangement that prevents solution mixing while maintaining small apparatus size
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the reduction of the number of modules needed, minimizing the apparatus size while ensuring effective and separate treatment of positive and negative developing solutions without mixing, thereby enhancing operational efficiency.
Implementation Method 1
a cup body that is formed in a bottomed circular shape with an upper side open and collects the developing solution scattering with rotation of the substrate
Data Source
AI summary
The present invention is a developing treatment apparatus for performing development by supplying a developing solution to a substrate having a front surface coated with a positive resist or a negative resist and then subjected to exposure wherein a movable cup is raised to introduce one of scattering developing solutions for the positive and negative resists into an inner peripheral flow path of a cup and the movable cup is lowered to introduce the other of scattering developing solutions for the positive and negative resists into an outer peripheral flow path of the cup, and the developing solution introduced into the inner peripheral flow path and the developing solution introduced into the outer peripheral flow path are separately drained.