Movable End Cap for Electrostatic Field Shielding in Dual-Mode Particle Beam Systems
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Solution Overview
Problem
Existing particle beam systems face challenges in achieving high precision for both electron and ion beams when operating in the same mode, as the electrostatic field used for high-resolution imaging of secondary particles affects the precision of the ion beam, compromising its accuracy.
Innovation Solution
A dual operating mode system where the end cap is positioned to control the electrostatic field, allowing for high precision in electron beam imaging while reducing its impact on the ion beam, enabling precise ion beam processing by adjusting the field strength between the particle beam columns.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If an electrostatic field is used to accelerate secondary particles to the detector for high-resolution imaging, then measurement precision is improved, but manufacturing precision deteriorates because the electrostatic field affects the ion beam path
Solution Approach 1:
The end cap is made movable between different positions: in the first position, it allows the electrostatic field to act on secondary particles for high-resolution imaging; in the second position, it shields the ion beam from the electrostatic field to maintain beam positioning precision. This dynamic reconfiguration resolves the contradiction by adapting the system state to the current operational requirement.
Solution Approach 2:
The end cap serves as an intermediary element that mediates between the electrostatic field and the ion beam. By positioning the end cap between the electrostatic field source and the ion beam path, it selectively blocks or permits the field's influence, thereby protecting the ion beam precision when needed while allowing high-resolution imaging when the end cap is repositioned.
2Measurement precision
If the electrostatic field strength is increased to improve secondary particle detection, then measurement precision is improved, but the ion beam path is more strongly affected, worsening manufacturing precision
Solution Approach 1:
The system dynamically adjusts the electrostatic field's influence by moving the end cap. When high detection precision is needed, the end cap is positioned to allow strong electrostatic field interaction with secondary particles. When ion beam processing precision is required, the end cap is repositioned to shield the beam, effectively reducing the field's harmful influence while maintaining the field strength capability when needed.
Solution Approach 2:
The end cap segments the interaction space between the electrostatic field and the ion beam. By introducing this physical segmentation, the system can selectively allow or block the field's influence on different particle types (secondary particles vs. ion beam) based on the operational mode, thereby resolving the precision contradiction.
3Device complexity
If a single particle beam column is used to reduce system complexity, then device complexity is reduced, but the ability to perform both high-resolution imaging and precise processing simultaneously is lost, reducing versatility
Solution Approach 1:
The end cap provides multi-functionality by serving different purposes in different operational modes: in the first mode, it enables high-resolution imaging by allowing secondary particle detection; in the second mode, it enables precise ion beam processing by shielding the beam from electrostatic field interference. This universal component allows a single system to perform multiple functions that would otherwise require separate specialized systems.
Solution Approach 2:
The movable end cap introduces dynamic reconfigurability to the system, allowing it to adapt its structure based on the required function. This dynamic element enables a single particle beam column system to switch between imaging mode and processing mode, achieving versatility without requiring multiple fixed-purpose beam columns.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system achieves high-resolution imaging and precise processing by alternating operating modes, ensuring high precision for both electron and ion beams, with the electron beam operating with high resolution in one mode and the ion beam in another, allowing for efficient data-driven control and reduced damage to the object.
Implementation Method 1
The first particle beam column can include at least one electrode which produces an electrostatic field, wherein the electrostatic field is suited to decelerate or accelerate the first particle beam
Implementation Method 2
the electrostatic field furthermore has the effect that the secondary particles coming from the object are accelerated to the detector which is arranged in the first particle beam column, as a result of which a high quantity of secondary particles can be detected
Implementation Method 3
In the second operating mode, the strength of the electrostatic field in the common work region is lowered by the arrangement of the end cap between the first particle beam column and the object
Data Source
AI summary
A particle beam system includes first and second particle beam columns. In a first operating mode, an end cap having an opening therein is outside a beam path of a first particle beam. In a second operating mode, the beam path of the first particle beam can extend through the opening of the end cap so that secondary particles coming from a work region can pass through the opening of the end cap to a detector in the interior of the first particle beam column. While the particle beam system is in the first operating mode, an image of an object arranged in the work region is recorded using the first particle beam column. While the particle beam system is in the second operating mode, the object is processed using a second particle beam.