Movable Fastening Substrate Support for Thermal Expansion
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Solution Overview
Problem
The handling and processing of large-size glass substrates in vacuum coating processes face challenges such as difficult transport, substrate damage, uneven shadowing due to misaligned edge exclusions, and maintaining exact positioning during dynamic coating processes, leading to inexact layer deposition and particle contamination.
Innovation Solution
A substrate support system with a combination of fixed and movable fastening means for precise alignment and thermal compensation, along with a labyrinth seal edge exclusion to prevent particle deposition on the substrate support, ensuring exact positioning and reduced particle contamination.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a fixed fastening means is used to align the substrate, then positioning precision is improved, but thermal expansion compensation is worsened
Solution Approach 1:
The substrate support system employs a hybrid fastening mechanism where at least one fastening means is movable relative to the frame, allowing dynamic adjustment to compensate for thermal expansion while maintaining precise substrate positioning. The movable fastening means can shift position in response to thermal changes, preventing distortion of the fixed fastening means and ensuring continuous alignment accuracy.
2Stability of the object's composition
If the substrate is securely fixed to the support, then positioning stability is improved, but particle deposition on the support is worsened
Solution Approach 1:
The patent introduces an edge exclusion component that is movable relative to the substrate support. This edge exclusion can be positioned to shield the support frame from particle deposition while maintaining secure substrate fixation. By separating the substrate holding function from the support structure, the system prevents particles from contaminating the support while keeping the substrate firmly in place.
3Measurement precision
If the edge exclusion is fixed relative to the substrate, then alignment precision is improved, but thermal expansion effects are worsened
Solution Approach 1:
The edge exclusion is designed to be movable relative to the substrate support, enabling it to dynamically adjust its position in response to thermal expansion. This movement capability allows the edge exclusion to maintain precise alignment with the substrate despite temperature changes, preventing misalignment that would occur with a fixed configuration.
4Device complexity
If a simple substrate support structure is used, then device complexity is reduced, but positioning precision is worsened
Solution Approach 1:
The substrate support system is segmented into distinct functional components: a frame, multiple fastening means (at least one movable), and an edge exclusion (movable). This segmentation allows each component to perform its specific function optimally while maintaining overall system simplicity. The modular design achieves high positioning precision without requiring a completely complex integrated structure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system enables precise alignment and positioning of glass substrates, compensates for thermal expansion, and effectively prevents particle deposition on the substrate support, improving the accuracy and quality of layer deposition and reducing substrate damage.
Implementation Method 1
Due to thermal expansions of the carrier, the glass substrate has no defined position relative to the carrier during the processing/coating steps
Data Source
AI summary
A substrate support for supporting a substrate in a processing chamber comprises a frame for carrying the substrate, at least a first fastening means fixedly attached to the frame for aligning the substrate relative to the frame, and at least a second fastening means movably attached to the frame, the second fastening means being movable relative to the frame and/or the substrate. Furthermore, a processing device comprises an edge exclusion projecting over a portion of the surface of the substrate in order to prevent processing of the portion of the surface of the substrate. A part of the edge exclusion may be moved into a gap between the edge(s) of the substrate and the frame element of the substrate support to form a labyrinth seal between the frame element and the edge of the substrate. A method of placing the substrate on the substrate support is also disclosed.