Movable Filter Element for Electron Beam Detection
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Solution Overview
Problem
Existing electron beam devices suffer from inefficient detection of cathodoluminescent light due to distant detection setups, leading to intensity losses and obscured secondary or backscattered electrons, and require multiple detectors for interaction particles and electromagnetic radiation, increasing complexity.
Innovation Solution
A detection device with a movable filter element that allows for the detection of both interaction particles and electromagnetic radiation using a single detector, positioned inside the sample chamber to eliminate the need for waveguides and reduce complexity, with the filter element preventing interaction particles from striking the detector in one position and allowing them to do so in another.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a detector is positioned inside the sample chamber close to the object, then detection efficiency and solid angle coverage are improved, but interaction particles may strike the detector causing signal contamination
Solution Approach 1:
A movable filter element is introduced as an intermediary between the object and the detector. This filter selectively blocks interaction particles (such as secondary electrons and backscattered electrons) while allowing electromagnetic radiation (cathodoluminescence) to pass through to the detector, thereby preventing signal contamination while maintaining close detector positioning for high detection efficiency
Solution Approach 2:
The filter element is designed to be movable between different positions. It can be dynamically inserted into or removed from the detection path depending on whether interaction particle detection or electromagnetic radiation detection is required, allowing flexible adaptation to different measurement modes
2Adaptability or versatility
If multiple detectors are used to detect both interaction particles and electromagnetic radiation, then detection capability is improved, but device complexity increases
Solution Approach 1:
A single detector is designed to perform multiple functions by detecting different types of signals at different times. The detector can alternately detect interaction particles and electromagnetic radiation depending on the position of the movable filter, eliminating the need for multiple dedicated detectors and reducing device complexity while maintaining versatile detection capability
Solution Approach 2:
The movable filter enables dynamic switching of detection modes, allowing one detector to serve multiple purposes. By changing the filter position, the system can alternately measure interaction particles and electromagnetic radiation with the same detector, replacing what would traditionally require multiple simultaneous detectors
3Reliability
If waveguides are used to transmit electromagnetic radiation from the sample chamber, then detection is enabled, but intensity losses occur
Solution Approach 1:
The detector is extracted from the external position and placed directly inside the sample chamber close to the object. This eliminates the need for waveguides and intermediate transmission paths, allowing direct detection of electromagnetic radiation and preventing intensity losses that would occur in waveguide transmission
Solution Approach 2:
The movable filter serves as a selective mediator that allows electromagnetic radiation to pass directly to the detector while blocking interaction particles. This direct path eliminates the need for waveguides and their associated intensity losses, while still providing the necessary particle radiation protection
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enhances detection efficiency by allowing the detector to cover a larger solid angle, reduces intensity losses, and simplifies the setup by eliminating the need for additional detectors, enabling accurate differentiation between interaction particle and electromagnetic radiation signals.
Implementation Method 1
at least one filter element, through which the X-rays are transmitted and which is designed for preventing backscattered electrons from striking the detector
Implementation Method 2
A detection device and a particle beam device having a detection device... at least one detector for detecting electromagnetic radiation and/or interaction particles
Implementation Method 3
enabling accurate differentiation between interaction particle and electromagnetic radiation signals
Data Source
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AI summary
The invention relates to a detection device (22) and a particle beam device (1) having a detection device (22). The detection device (22) and the particle beam device (1) ensure a good efficiency in detecting interaction particles and electro-magnetic radiation. The detection device (22) has a detector (14) for detecting electromagnetic radiation and/or interaction particles and a filter element (13) through which the electromagnetic radiation is transmitted and which is designed for preventing the interaction particles from striking the detector (14) wherein the filter element (13) is situated to move between a first position (A) and a second position (B), the filter element (13) in the first position (A) being situated in relation to the detector (14) in such a way that the filter element (13) prevents the interaction particles from striking the detector (14), and wherein the filter element (13) in the second position (B) is situated in relation to the detector (14) in such a way that the filter element (13) allows the interaction particles to strike the detector (14). As an alternative, the filter element (13) may be designed as an object holder.