Movable Front Storage System for Semiconductor Maintenance
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Solution Overview
Problem
Conventional front automatic storage systems cause prolonged idle time for processing apparatuses during maintenance, as they need to be removed and reattached, which is time-consuming and disrupts the continuous operation of semiconductor or liquid crystal device manufacturing plants.
Innovation Solution
An automatic storage system with movable shelves and a transferring apparatus that can be moved horizontally away from the processing apparatus's transfer port during maintenance, allowing for quick relocation and reattachment, utilizing a mover with wheels, a guide mechanism, and a stopper to facilitate efficient movement and positioning, thereby minimizing downtime.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the front automatic storage system is fixed in position to ensure stable operation, then the reliability of article transfer is improved, but the ease of repair deteriorates because the system cannot be easily accessed during maintenance
Solution Approach 1:
The storage system is transformed from a fixed structure to a movable one by introducing a mover with wheels that can transport the entire storage system and transferring apparatus along a guide rail. This dynamic configuration allows the system to be positioned for stable operation during manufacturing and easily moved away during maintenance, resolving the contradiction between reliability and ease of repair
2Ease of repair
If the storage system is removed during maintenance to allow access to the processing apparatus, then the ease of repair is improved, but the loss of time increases due to removal and reattachment operations
Solution Approach 1:
The movable storage system can be quickly repositioned away from the processing apparatus during maintenance and returned to its operational position afterward. This dynamic positioning capability eliminates the time-consuming removal and reattachment operations while still providing full maintenance accessibility, thus improving ease of repair without increasing time loss
3Ease of repair
If the storage system is designed to be movable to facilitate maintenance, then the ease of repair is improved, but the device complexity increases due to additional moving components
Solution Approach 1:
The storage system incorporates a mover with wheels and a guide mechanism to enable movement. These components add some complexity but are designed to be simple and efficient, providing the necessary mobility for maintenance while minimizing the increase in overall device complexity
Solution Approach 2:
The storage system is divided into separable components: the storage shelves, the transferring apparatus, and the mover. This segmentation allows the mover to be independently controlled and positioned, simplifying the overall system architecture while maintaining ease of repair
Data Source
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AI summary
The front automatic storage system includes a plurality of shelves, a transferring apparatus, and a moveable frame. The shelves are arranged facing a semiconductor processing apparatus and at least one of the shelves is positioned above a transfer port of the semiconductor processing apparatus. The transferring apparatus is contrived to move among the shelves and transfer cassettes C between any shelf and the transfer port. The frame is contrived such that it can move the transferring apparatus and the at least one shelf positioned above the transfer port. The frame is also contrived such that it can move in a first horizontal direction toward and away from a first position where the at least one shelf is arranged above the transfer section.