Movable Heater Degas Station for Uniform Substrate Heating
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Solution Overview
Problem
Existing degas systems in semiconductor processing inefficiently heat substrates, leading to increased power consumption, uneven heating, and potential substrate damage due to localized hotspots.
Innovation Solution
A degas station with a magnetic levitation system and dual heater assemblies, where the heater assemblies include reflectors and heat sources, and are positioned to target the substrate directly, reducing the volume of heated space and enhancing heating uniformity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Use of energy by stationary object
If heating elements are disposed at fixed locations within a processing region, then the heating structure is simple, but the heat is not targeted at the substrate, increasing power consumption and causing unnecessary heating of chamber components
Solution Approach 1:
The heating elements are made movable rather than fixed, allowing them to be dynamically positioned to target the substrate during heating operations. This dynamic positioning enables focused heating where needed while reducing unnecessary heating of surrounding chamber components, thereby improving energy efficiency.
Solution Approach 2:
The heating elements can be positioned at different locations to provide localized heating targeted at the substrate. This allows the heat to be concentrated where it is most needed rather than uniformly distributed throughout the chamber, reducing overall power consumption while maintaining effective substrate heating.
2Use of energy by stationary object
If heating elements heat the interior volume of the degas system, then the heating coverage is comprehensive, but power consumption increases and chamber components are unnecessarily heated
Solution Approach 1:
The movable heating elements enable localized heating targeted at the substrate rather than uniform heating of the entire chamber volume. This concentrates thermal energy where needed, improving energy efficiency while maintaining appropriate temperature distribution.
Solution Approach 2:
By making the heating elements movable, the system can dynamically adjust the heating zone to match the substrate position and size, providing comprehensive heating coverage of the substrate while minimizing heating of surrounding areas, thus reducing power consumption.
3Reliability
If heating elements cause uneven heating of the substrate, then the heating process is simple, but it leads to unsatisfactory degassing and substrate damage at localized hotspots
Solution Approach 1:
The movable heating elements allow dynamic adjustment of heating zones to achieve uniform heat distribution across the substrate surface. By positioning multiple heating elements at different locations and controlling their individual output, the system can eliminate localized hotspots while maintaining substrate integrity throughout the degassing process.
Solution Approach 2:
Each heating element can be independently controlled to provide localized heating to specific areas of the substrate. This enables precise thermal management where different regions of the substrate receive appropriate heating levels, preventing overheating and damage while ensuring thorough degassing.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution reduces power consumption, achieves more uniform substrate heating, and minimizes the risk of substrate damage, thereby improving the efficiency and reliability of the degassing process.
Implementation Method 1
a magnetic levitation system coupled to the housing and configured to levitate and move a carrier within the housing
Implementation Method 2
a first heat source coupled to reflector... a second heat source coupled to the second reflector
Implementation Method 3
The first heater assembly includes a first support, a first reflector disposed within the housing by the first support, and a first heat source coupled to reflector
Data Source
AI summary
Degas stations for degassing substrates that are conveyed through a substrate processing system on a magnetically levitated carrier and related methods are provided. The method includes magnetically levitating a carrier with a substrate disposed thereon in a first position between a reflector assembly and a heater assembly disposed within a housing of the station. The method further includes moving both the reflector assembly and the heater assembly from a retracted position to an extended position while the carrier is disposed between the reflector assembly and heater assembly. The method further includes degassing the substrate disposed on the carrier with the heater assembly while the reflector assembly and heater assembly are each in the extended position, wherein the degassing includes pumping a purge gas through a gas port formed in at least one of the reflector assembly or the heater assembly towards the substrate.