Movable Heating Portion for Crucible Withdrawal in Display Deposition

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Solution Overview

Problem

Interference between a mask sheet and a shielding stick in deposition processes for display device manufacturing can lead to reduced deposition quality due to misalignment, causing the deposition material not to be deposited at the required position on the substrate.

Innovation Solution

An apparatus and method that includes a movable second heating portion connected to a first heating portion, allowing the crucible to be withdrawn from the deposition frame, and a reflector to prevent heat transfer to the mask assembly, along with an angle limiting portion to control the deposition material's supply angle, ensuring precise deposition.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If the heating portion is fixed in position, then the structure is simple and stable, but the crucible cannot be readily discharged to the outside of the deposition part

Engineering Contradiction:
Improvecrucible dischargeVSAvoidheating portion structure
Core Design Contradiction:
Ease of operationVSDevice complexity

Solution Approach 1:

The heating portion is designed to be movable between a first position for heating the nozzle and a second position that provides withdrawal space for discharging the crucible. This dynamic positioning allows the same component to serve multiple functions: heating during deposition and facilitating crucible removal when needed, thereby improving operational ease without requiring separate components for each function.

Inventive Principle:
Principle #15Dynamics

2Productivity

If the deposition material is heated excessively, then the deposition efficiency is improved, but the heat may be transferred to the mask assembly causing quality issues

Engineering Contradiction:
Improvedeposition efficiencyVSAvoidheat transfer to mask assembly
Core Design Contradiction:
ProductivityVSObject-affected harmful factors

Solution Approach 1:

A reflector is introduced as an intermediary component between the heating portion and the mask assembly. The reflector redirects heat away from the mask assembly while allowing the heating portion to effectively heat the deposition material in the crucible. This intermediary element enables high-temperature deposition processes without transferring harmful heat to adjacent components like the mask assembly.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The harmful heat transfer path to the mask assembly is extracted and blocked by the reflector, which separates the thermal field of the heating portion from the mask assembly. This allows the heating function to be optimized for deposition efficiency while the mask assembly is protected from excessive heat through the reflector's geometric design.

Inventive Principle:
Principle #2Taking out (Extraction)

3Manufacturing precision

If the deposition material is sprayed without angle control, then the deposition process is simple, but the deposition material may not be deposited at the required position on the substrate

Engineering Contradiction:
Improvedeposition position accuracyVSAvoidangle control mechanism
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The angle limiting portion is designed to passively control the deposition angle through its geometric configuration rather than requiring active adjustment mechanisms. The structure itself defines the acceptable angle range for deposition material, allowing precise positioning control to be built into the hardware design while keeping the system operationally simple.

Inventive Principle:
Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution enhances the precision and quality of the deposition process by allowing for controlled heating and positioning of the deposition material, reducing misalignment issues and improving the overall quality of the display device manufacturing.

Implementation Method 1

a first heating portion disposed in the inner space of the deposition frame and that heats the deposition material accommodated in the crucible

Methodology Applied
Scientific EffectHeating: Heating

Implementation Method 2

a second heating portion movable between a first position at which the nozzle is heated

Methodology Applied
Scientific EffectHeating: Heating

Implementation Method 3

a nozzle connected to the crucible and that sprays the deposition material accommodated in the crucible

Methodology Applied
Scientific EffectSpray: Spray

Implementation Method 4

a reflector connected to the deposition frame and disposed between the first heating portion and the mask assembly to prevent heat generated in the inner space of the deposition frame from being transferred to the mask assembly

Methodology Applied
Scientific EffectHeat reflection: Reflection

Implementation Method 5

a deposition source including a deposition part that supplies deposition material to the mask assembly

Methodology Applied
Scientific EffectPhysical vapor deposition: Physical Vapour Deposition

Data Source

PatentUS20240026518A1Apparatus and method for manufacturing display device
Publication Date: 2024.01.25 SAMSUNG DISPLAY CO LTD
  • US20240026518A1 patent drawing
  • US20240026518A1 patent drawing
  • US20240026518A1 patent drawing

AI summary

An apparatus for manufacturing a display device includes a mask assembly, and a deposition source including a deposition part that supplies deposition material to the mask assembly. The deposition part includes a deposition frame including an inner space, a crucible disposed in the inner space of the deposition frame to be withdrawn from the deposition frame and accommodating the deposition material, a nozzle connected to the crucible and that sprays the deposition material accommodated in the crucible, a first heating portion disposed in the inner space of the deposition frame and that heats the deposition material accommodated in the crucible, and a second heating portion being movable between a first position at which the nozzle is heated and a second position at which a withdrawal space so that the crucible is withdrawn from the deposition frame.