Movable Inner Conductor Antenna for Plasma Density Control
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Solution Overview
Problem
Existing plasma processing apparatuses face challenges in flexibly adjusting electric field strength and plasma density distribution during semiconductor wafer processing, limiting process efficiency and control.
Innovation Solution
The antenna device includes a configuration of waveguides, inner conductors, and a drive device that adjusts the gap between inner conductors and a dielectric window, allowing for flexible adjustment of electric field strength and plasma density distribution by varying the position of inner conductors along the waveguide axis.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a fixed antenna structure is used, then the device complexity is reduced, but the adaptability to adjust electric field strength and plasma density distribution is limited
Solution Approach 1:
The patent applies the dynamics principle by making the inner conductor movable along the waveguide axis through a drive device. This allows the antenna structure to dynamically adjust the gap between the inner conductor and dielectric window, enabling flexible control of electric field strength and plasma density distribution while maintaining a relatively simple overall structure.
2Manufacturing precision
If the inner conductor position is fixed, then the manufacturing precision is improved, but the ability to control plasma density distribution is reduced
Solution Approach 1:
The patent resolves this contradiction by implementing a movable inner conductor system with a drive device that can precisely position the conductor at different locations along the waveguide axis. This dynamic positioning capability allows the system to achieve precise plasma density control through adjustable gap distances while maintaining manufacturing precision through controlled movement and positioning mechanisms.
Solution Approach 2:
The patent applies parameter changes by varying the position of the inner conductor along the waveguide axis, which directly changes the gap parameter between the conductor and dielectric window. This parameter adjustment enables flexible control of electric field strength and plasma density distribution, allowing the system to adapt to different processing conditions while maintaining manufacturing precision.
3Measurement precision
If a simple waveguide configuration is used, then the device complexity is reduced, but the precision of electric field control is insufficient
Solution Approach 1:
The patent enhances electric field control precision by implementing a movable inner conductor within the waveguide configuration. The drive device enables precise adjustment of the inner conductor position, allowing fine-tuned control of the gap between the conductor and dielectric window. This dynamic adjustment capability provides precise electric field strength control while maintaining a relatively simple waveguide structure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables precise control over plasma density distribution, enhancing process efficiency and adaptability to different processing conditions by adjusting the electric field strength of radiated electromagnetic waves.
Implementation Method 1
The antenna device is configured to radiate electromagnetic waves. The drive device is configured to drive the first inner conductor in the direction of the tube axis.
Data Source
AI summary
In one exemplary embodiment, a second waveguide is connected to an upper wall of a first waveguide and communicates with the first waveguide, a dielectric window is in contact with a lower wall of the first waveguide, a first inner conductor penetrates an upper wall, is electrically connected with the upper wall, and extends along the direction of a tube axis from an inside of the first waveguide to an inside of a third waveguide, the third waveguide is connected to the lower wall on the dielectric window side and communicates with the first waveguide, a first opening end of the third waveguide is connected to the dielectric window, and a drive device is connected to the first inner conductor, and is configured to drive the first inner conductor in the direction of the tube axis.