Movable Insulating Pipe for Semiconductor Heater Temperature Sensors
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Solution Overview
Problem
Existing temperature sensors in heat treatment apparatuses for semiconductor manufacturing are prone to damage due to thermal stress caused by high temperatures, which affects their ability to accurately measure heater temperatures.
Innovation Solution
A temperature sensor configuration with a movable insulating pipe that includes a micro space and positioners to absorb thermal expansion, allowing the sensor to measure temperatures without direct contact with the heater, thus preventing damage from thermal stress.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the thermocouple is disposed in the vicinity of the heater to measure heater temperature, then temperature measurement capability is improved, but the thermocouple may be damaged due to thermal stress from thermal expansion
Solution Approach 1:
The thermocouple assembly is segmented into distinct functional components: the thermocouple sensor itself, the insulating pipe that houses it, and the mounting structure. This segmentation allows each component to be optimized independently - the insulating pipe can be designed to accommodate thermal expansion while the thermocouple maintains its measurement function.
Solution Approach 2:
An insulating pipe is introduced as an intermediary element between the thermocouple and the heater environment. This pipe serves multiple functions: it provides thermal insulation to protect the thermocouple from excessive heat, maintains structural integrity during thermal expansion, and enables the thermocouple to be positioned near the heater without direct exposure to damaging conditions.
2Measurement precision
If the thermocouple is positioned close to the heater for accurate measurement, then measurement accuracy is improved, but thermal expansion of nearby members causes damage
Solution Approach 1:
The insulating pipe is designed with features that anticipate and accommodate thermal expansion before it causes damage. The pipe's structural design includes provisions for movement and expansion, creating a cushioning effect that absorbs thermal stress prior to it reaching the thermocouple sensor.
Solution Approach 2:
The insulating pipe's physical parameters (such as material composition, wall thickness, and dimensional tolerances) are specifically designed to handle thermal expansion. By changing these parameters, the pipe can withstand the thermal environment near the heater while protecting the thermocouple from damaging stress.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate temperature measurement near the heater without risking damage from thermal expansion, ensuring reliable operation and extending the lifespan of the temperature sensor.
Implementation Method 1
the thermocouple (the first temperature sensor) disposed in the vicinity of the heater may be damaged due to a thermal stress caused by thermal expansion of members in the vicinity of the heater
Data Source
AI summary
There is provided a configuration installed on a mount provided with an opening, that includes a main body connected to the mount to penetrate the opening while providing a micro space; a first positioner attached to a side of a leading end portion of the main body with respect to the mount; and a second positioner attached to a side of a tail end portion of the main body with respect to the mount, wherein the main body is movable within a range determined by the micro space, the first positioner, and the second positioner.