Movable Magnet Door Sealing for Particle-Free Substrate Containers
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Solution Overview
Problem
Current semiconductor industry standards for mechanically sealing substrate containers, such as FOUPs, face challenges including particle generation, non-uniform seals, and potential damage from force transmission, highlighting the need for a more reliable and controllable sealing mechanism.
Innovation Solution
The implementation of a magnetically sealable substrate container system utilizing moveable magnets near the perimeter of the container door, a linkage hub, and control linkages to facilitate a secure air-tight seal, with mechanisms for rotating the linkage hub to switch between sealed and open positions, and the use of return springs and static magnets to ensure evenly distributed sealing forces.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If mechanical seals are used to seal the container door, then the sealing function is achieved, but particles are generated where latches engage and the seal becomes difficult to control uniformly
Solution Approach 1:
The patent replaces the mechanical latch system with a magnetic field-based sealing mechanism. Magnets are positioned on the door and corresponding magnetic elements on the container body create magnetic attraction forces that seal the door without mechanical contact, eliminating particle generation from mechanical engagement while maintaining reliable sealing.
2Manufacturing precision
If mechanical seals with latches are used, then the container can be sealed, but uniform sealing force is difficult to achieve across the door perimeter
Solution Approach 1:
The magnetic sealing system eliminates complex mechanical linkages and replaces them with magnetic fields that naturally distribute sealing force uniformly across the door perimeter. The magnetic attraction forces act distributedly along the sealing interface, achieving uniform sealing without the complexity of mechanical force distribution mechanisms.
3Ease of operation
If mechanical force transmission is used to operate the seal, then the door can be secured, but the weakest part of the transmission chain may be damaged
Solution Approach 1:
The patent replaces mechanical force transmission chains with magnetic field interactions. A magnet positioned on the door can be actuated to engage with magnetic elements on the container body, creating sealing force through magnetic attraction without mechanical force transmission. This eliminates the weakest link problem inherent in mechanical transmission chains.
4Object-generated harmful factors
If magnets are used to seal the container door, then particle generation is eliminated, but a controllable mechanism is needed to move magnets between sealed and open positions
Solution Approach 1:
The magnetic sealing system divides the door into multiple segments, each with its own magnet and positioning mechanism. This segmentation allows independent control of different door sections, enabling precise positioning of magnets between sealed and open positions while maintaining low overall complexity through modular design.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution provides a reliable, particle-free, and evenly distributed sealing force, reducing the risk of contamination and damage, while allowing for controlled sealing and unsealing of the container, suitable for various atmospheres including vacuum and inert gases.
Implementation Method 1
An arrangement of moveable magnets in a door of the container and corresponding magnets or magnetically attractive elements in the container body may facilitate securing the container door to the container body to enable the air-tight seal
Implementation Method 2
The return spring acts on at least one of the plurality of magnets or the linkage hub
Data Source
AI summary
A system of moving magnets for sealing a container may include a plurality of moveable magnets disposed near a perimeter of a container door and a rotatable linkage hub positioned within the perimeter of the container door. In addition, the system may include a plurality of control linkages connecting each of the plurality of moveable magnets to the linkage hub so that rotating the linkage hub causes the control linkages to move the moveable magnets between a sealed position and an open position. Alternatively, the moveable magnets may be connected to each other by a magnet positioning mechanism to physically move the magnets along a path near the perimeter. A plurality of static magnets may be disposed near an opening sized to receive the container door and positioned to form a magnetic seal with the moveable magnets when the moveable magnets are positioned at the sealed position.