Movable Nozzle Thin Film Deposition for Large Substrate Precision
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Solution Overview
Problem
Conventional thin film deposition methods face challenges in achieving high light-emission efficiency and pattern precision for large organic light-emitting display devices, particularly on substrates of 5G or more, due to difficulties in forming fine patterns and varying red, green, and blue light-emission efficiency in organic thin films, which affects manufacturing yield and device performance.
Innovation Solution
A thin film deposition apparatus with a movable structure that includes a deposition source, nozzles with slits, and a barrier wall assembly, allowing for adjustable intervals and alignments between the nozzles and substrate, enabling precise deposition and improved deposition efficiency through real-time feedback control and the use of piezoelectric motors for precise movement and alignment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a conventional thin film deposition apparatus is used to form fine patterns on large substrates (5G or more), then the substrate can be processed, but the manufacturing yield and light-emission efficiency deteriorate due to difficulties in forming fine patterns and varying red, green, and blue light-emission efficiency
Solution Approach 1:
The patent employs a movable nozzle that can dynamically adjust its position and orientation relative to the substrate. The nozzle is equipped with piezoelectric motors that enable real-time movement in multiple directions (X, Y, Z axes and rotational movements) to maintain optimal deposition angles and distances across large substrate areas, ensuring consistent pattern precision and light-emission efficiency throughout the manufacturing process
Solution Approach 2:
The system incorporates sensors that continuously monitor the nozzle-substrate relative position, deposition rate, and film quality. This real-time feedback is processed by a control unit that automatically adjusts the nozzle's movement and deposition parameters to compensate for variations, maintaining high manufacturing yield and consistent light-emission characteristics across large substrates
2Device complexity
If the interval between the nozzle and substrate is fixed, then the apparatus structure is simpler, but the light-emission efficiency and pattern precision worsen due to inability to optimize deposition parameters for different regions
Solution Approach 1:
The nozzle is designed with movable components that allow dynamic adjustment of the interval distance and angular orientation relative to the substrate. Piezoelectric motors enable precise control of the nozzle's position in the Z-axis (interval adjustment) and rotational角度, allowing optimization of deposition parameters for different substrate regions while maintaining a relatively simple overall apparatus structure
Solution Approach 2:
The movable nozzle assembly serves multiple functions: it can adjust deposition distance, change deposition angle, and maintain optimal positioning throughout the substrate area. This multi-functionality is achieved through integrated piezoelectric motor mechanisms that combine interval adjustment and angular orientation capabilities in a single apparatus component
3Area of stationary object
If conventional deposition methods are used for large substrates, then the processing area is sufficient, but the light-emission efficiency deteriorates due to varying red, green, and blue light-emission efficiency in organic thin films
Solution Approach 1:
The movable nozzle enables dynamic adjustment of deposition parameters across different substrate regions. By varying the deposition angle and distance for different areas, the system optimizes the formation of organic thin films with consistent red, green, and blue light-emission efficiency, ensuring high reliability across the entire large substrate area
Solution Approach 2:
The system applies localized deposition control by adjusting the nozzle's position and angle specific to each substrate region. This allows tailored optimization of film properties for different areas, ensuring uniform light-emission characteristics across the entire large substrate while maintaining the capability to process large areas
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus enhances manufacturing yield and deposition efficiency, allowing for the production of large-sized display devices with improved light-emission efficiency, pattern precision, and reduced manufacturing costs by optimizing the interval and alignment control between the deposition source and substrate, thereby addressing the challenges of conventional methods.
Implementation Method 1
the use of piezoelectric motors for precise movement and alignment
Implementation Method 2
a deposition method... a thin film material is deposited over the FMM in order to form the thin film having the desired pattern
Data Source
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AI summary
A thin film deposition apparatus used to produce large substrates on a mass scale and improve manufacturing yield. A thin film deposition apparatus for forming a thin film on a substrate, the apparatus comprising: a deposition source arranged to discharge a deposition material; a first nozzle disposed downstream of the deposition source and including a plurality of first slits arranged in a first direction; a second nozzle disposed downstream of the first nozzle and including a plurality of second slits arranged in a second direction perpendicular to the first direction; wherein the thin film deposition apparatus is arranged to perform deposition while the thin film deposition apparatus moves relative to the substrate in the first direction.