Movable Nozzle Piping With Protective Sleeve for Leak Containment
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Solution Overview
Problem
Conventional substrate processing apparatuses face issues with pipe damage and liquid leakage due to repetitive deformation and rubbing between pipes, leading to contamination and damage of the apparatus.
Innovation Solution
A substrate processing apparatus is designed with a protective pipe surrounding the outer periphery of the pipes connected to nozzles, along with a nozzle driver for moving the nozzles and a leak sensor to detect any leaks, preventing liquid scattering and allowing for appropriate measures to be taken.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If the nozzles are made movable to enable positioning and processing operations, then the processing capability and flexibility are improved, but the pipes connected to the nozzles undergo repetitive deformation and rubbing which leads to pipe damage and liquid leakage
Solution Approach 1:
The patent applies the nesting principle by placing the movable pipe inside a protective pipe. The protective pipe acts as an outer container that surrounds and protects the inner movable pipe from external damage, rubbing, and deformation. This nested structure allows the inner pipe to move freely while being shielded by the outer protective pipe, thereby maintaining both the processing capability of the movable nozzle and the reliability of the liquid supply system.
Solution Approach 2:
The protective pipe serves as a preventive measure that cushions and protects the inner pipe before damage can occur. By providing this protective enclosure in advance, the system prevents repetitive deformation and rubbing from causing pipe damage and liquid leakage, thus maintaining system reliability while allowing nozzle movement for processing operations.
2Ease of operation
If the pipes are made movable along with the nozzles, then the liquid supply to moving nozzles is maintained, but the pipes are liable to be damaged due to expansion, contraction, bend or twist
Solution Approach 1:
The movable pipe is nested within the protective pipe, allowing the inner pipe to move freely for liquid supply while the outer protective pipe shields it from mechanical damage. This nested configuration maintains liquid supply continuity to moving nozzles while preventing pipe damage from expansion, contraction, bending, or twisting.
Solution Approach 2:
The protective pipe provides beforehand cushioning and protection to the inner movable pipe. This preventive structure ensures that the pipe can move for liquid supply without suffering damage from mechanical stresses, thus maintaining both ease of operation and pipe durability.
3Productivity
If multiple nozzles are arranged in proximity to one another, then the processing efficiency is improved, but the pipes rub against one another and are more liable to be broken
Solution Approach 1:
Multiple movable pipes are nested within a common protective pipe structure. This nested arrangement allows multiple nozzles to be positioned in proximity for efficient processing while the outer protective pipe prevents the inner pipes from rubbing against each other, thereby maintaining both processing efficiency and pipe integrity.
4Reliability
If the pipes are damaged, then the processing cannot be appropriately performed, but providing protective structures increases the device complexity
Solution Approach 1:
The protective pipe is implemented as a simple nested structure that surrounds the movable pipe. This straightforward nested design provides reliable protection against pipe damage without significantly increasing device complexity, as the protective pipe integrates seamlessly with the existing nozzle and pipe assembly.
Solution Approach 2:
The protective pipe acts as an intermediary structure between the outer environment and the inner movable pipe. This intermediate protective layer shields the pipe from external damage while maintaining a relatively simple overall structure, thus ensuring processing reliability without excessive complexity.
Data Source
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AI summary
A substrate processing apparatus includes a nozzle, a pipe, a protective pipe, a nozzle driver, and a leak sensor. The nozzle discharges a processing liquid to a substrate to be processed. The pipe is connected to the nozzle. The protective pipe surrounds an outer periphery of the pipe. The nozzle driver moves the nozzle. The leak sensor detects a leak liquid from the pipe.