Movable Nozzle Apparatus for Semiconductor Chemical Liquid Supply
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Solution Overview
Problem
Conventional semiconductor device fabrication processes face inefficiencies due to the need to change nozzles frequently for different chemical liquids, which increases waiting time and prevents simultaneous supply of multiple chemical liquids, affecting processing efficiency and cleanliness.
Innovation Solution
An apparatus with independently movable nozzles and a nozzle cover system that allows for rapid exchange and simultaneous operation of multiple nozzles, reducing waiting time and enabling simultaneous supply of multiple chemical liquids.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a single nozzle is attached to the chuck cylinder for supplying chemical liquid, then the device structure is simple, but the processing efficiency is reduced due to the waiting time required to change nozzles when multiple chemical liquids need to be used successively
Solution Approach 1:
The single nozzle is divided into multiple nozzles (first nozzle, second nozzle, third nozzle) that can be independently moved forward and backward. Each nozzle can be independently positioned and operated, allowing multiple chemical liquids to be supplied simultaneously or sequentially without the need to detach and reattach nozzles, thereby eliminating changeover time and improving processing efficiency
Solution Approach 2:
The nozzles are made dynamically movable along the longitudinal direction of the chuck cylinder through independent driving mechanisms. This dynamic positioning capability allows the nozzles to be quickly repositioned between different chemical liquid supply positions without mechanical detachment, resolving the time loss associated with nozzle changes while maintaining operational flexibility
2Productivity
If only one nozzle is attached to the chuck cylinder, then the device complexity is low, but it is impossible to simultaneously supply multiple chemical liquids to the substrate
Solution Approach 1:
The nozzle system is segmented into multiple independent nozzles (first nozzle for first chemical liquid, second nozzle for second chemical liquid, third nozzle for third chemical liquid) that can be independently positioned and operated. This segmentation enables simultaneous supply of multiple chemical liquids to different regions of the substrate, achieving the productivity improvement while managing complexity through modular independent units
Solution Approach 2:
Each nozzle is designed with multi-functionality, capable of supplying different chemical liquids at different positions and times. The nozzles can function individually or in combination, providing universal chemical liquid supply capability across multiple positions on the substrate, thereby enabling simultaneous multi-chemical liquid supply without proportionally increasing overall system complexity
Data Source
AI summary
Provided is an apparatus for supplying chemical liquid. The apparatus includes: a plurality of nozzles, each of which can be moved forward or backward and supplies chemical liquid; a nozzle cover which accommodates the nozzles therein and has an open end to allow each of the nozzles to move into or out of the nozzle cover; and a nozzle driver which moves each of the nozzles forward or backward.