Movable Pin Substrate Holder for Edge Processing

Solution Overview

Problem

Existing substrate processing methods face challenges in effectively processing the peripheral edges of substrates due to contact-support positions remaining static, leading to incomplete liquid processing and residual issues.

Innovation Solution

A substrate processing apparatus and method utilizing a rotary table with movable pins and magnetic forces to dynamically change the contact-support positions along the peripheral edge of the substrate during rotation, ensuring comprehensive liquid processing without residuals.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the substrate is supported by holding pins at fixed contact positions during rotation, then the substrate is stably held and rotated, but the processing liquid cannot flow around the contact positions and processing residuals remain at the peripheral edge

Engineering Contradiction:

Improvesubstrate holding stabilityVSAvoidliquid processing completeness

Core Design Contradiction:

ReliabilityVSManufacturing precision

Solution Approach 1:

The holding pins are designed to be movable in the circumferential direction rather than fixed, allowing them to dynamically adjust their contact positions with the substrate peripheral edge during rotation. This dynamic positioning enables the processing liquid to flow around all areas of the substrate peripheral edge while maintaining stable substrate holding, thereby resolving the contradiction between holding stability and processing completeness.

Inventive Principle:

Principle #15Dynamics

2Device complexity

If the contact-support positions are kept static during substrate rotation, then the substrate holding structure is simple, but the peripheral edge processing is incomplete with residuals remaining

Engineering Contradiction:

Improveholding structure simplicityVSAvoidprocessing effectiveness

Core Design Contradiction:

Device complexityVSProductivity

Solution Approach 1:

The holding pins are designed to be movable in the circumferential direction rather than fixed, allowing them to dynamically adjust their contact positions with the substrate peripheral edge during rotation. This dynamic positioning enables the processing liquid to flow around all areas of the substrate peripheral edge while maintaining stable substrate holding, thereby resolving the contradiction between holding stability and processing completeness.

Inventive Principle:

Principle #15Dynamics

3Strength

If multiple holding pins are used to support the substrate, then the substrate is securely held, but the processing liquid flow is blocked at pin contact positions causing incomplete processing

Engineering Contradiction:

Improvesubstrate holding forceVSAvoidperipheral edge processing quality

Core Design Contradiction:

StrengthVSManufacturing precision

Solution Approach 1:

The holding pins are designed to be movable in the circumferential direction rather than fixed, allowing them to dynamically adjust their contact positions with the substrate peripheral edge during rotation. This dynamic positioning enables the processing liquid to flow around all areas of the substrate peripheral edge while maintaining stable substrate holding, thereby resolving the contradiction between holding stability and processing completeness.

Inventive Principle:

Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The apparatus effectively displaces contact-support positions in the circumferential direction, allowing for thorough processing of the substrate's peripheral edges, preventing residual issues and enhancing processing efficiency.

Implementation Method 1

a pressing magnet that has a magnetic pole that gives an attractive magnetic force or a repulsive magnetic force between the driving magnet and the pressing magnet and that presses the support portion against the peripheral edge of the substrate by urging the support portion toward the contact position by means of the attractive magnetic force or the repulsive magnetic force

Methodology Applied

Scientific EffectMagnetic force: Magnetism

Implementation Method 2

The processing liquid supplied to the upper surface of the substrate receives a centrifugal force due to rotation of the substrate and flows toward a peripheral edge portion of the substrate

Methodology Applied

Scientific EffectCentrifugal force: Centrifugal Force

Data Source

PatentUS11031235B2Substrate processing apparatus

Publication Date: 2021.06.08 SCREEN HOLDINGS CO LTD

AI summary

A substrate processing apparatus includes a driving magnet that is disposed correspondingly to a movable pin and that has a predetermined polar direction with respect to a radial direction of a rotary table, a pressing magnet that has a magnetic pole that gives an attractive magnetic force or a repulsive magnetic force between the driving magnet and the pressing magnet and that presses a support portion against a peripheral edge of a substrate by urging the support portion toward a contact position by means of the attractive magnetic force or the repulsive magnetic force, and a pressing-force changing unit that changes a magnitude of a pressing force against the peripheral edge of the substrate pressed by the support portion while keeping the magnitude higher than zero in response to rotation of the rotary table.